JPS61157806U - - Google Patents
Info
- Publication number
- JPS61157806U JPS61157806U JP4126685U JP4126685U JPS61157806U JP S61157806 U JPS61157806 U JP S61157806U JP 4126685 U JP4126685 U JP 4126685U JP 4126685 U JP4126685 U JP 4126685U JP S61157806 U JPS61157806 U JP S61157806U
- Authority
- JP
- Japan
- Prior art keywords
- position sensor
- target
- slider
- rail
- magnetically levitated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Non-Mechanical Conveyors (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4126685U JPS61157806U (enExample) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4126685U JPS61157806U (enExample) | 1985-03-20 | 1985-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157806U true JPS61157806U (enExample) | 1986-09-30 |
Family
ID=30550931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4126685U Pending JPS61157806U (enExample) | 1985-03-20 | 1985-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157806U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147349A (enExample) * | 1974-05-16 | 1975-11-26 | ||
| JPS586123A (ja) * | 1981-07-02 | 1983-01-13 | Nec Corp | 半導体結晶の製造方法 |
-
1985
- 1985-03-20 JP JP4126685U patent/JPS61157806U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50147349A (enExample) * | 1974-05-16 | 1975-11-26 | ||
| JPS586123A (ja) * | 1981-07-02 | 1983-01-13 | Nec Corp | 半導体結晶の製造方法 |