JPS61157776U - - Google Patents
Info
- Publication number
- JPS61157776U JPS61157776U JP4138985U JP4138985U JPS61157776U JP S61157776 U JPS61157776 U JP S61157776U JP 4138985 U JP4138985 U JP 4138985U JP 4138985 U JP4138985 U JP 4138985U JP S61157776 U JPS61157776 U JP S61157776U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- gas
- valve seat
- seals
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 2
Description
第１図は、本考案の一実施例を示す断面図、第
２図は、第１図の要部拡大断面図、第３図は、ロ
ータリジヨイントの断面図、第４図は、従来装置
の一例を示す断面図、第５図は、第４図の要部拡
大断面図である。
１…開閉弁、２…流路、４…弁座、５…弁体、
７…弁軸、８…駆動部、９…シール部材、１２…
空間部、１５…真空配管、１６…Ｏリング、２６
…リークガス吸引装置、２７，２８…通孔、２９
…連通路、３０…ロータリジヨイント、Ｓ…真空
源。
Fig. 1 is a sectional view showing an embodiment of the present invention, Fig. 2 is an enlarged sectional view of the main part of Fig. 1, Fig. 3 is a sectional view of the rotary joint, and Fig. 4 is a conventional device. FIG. 5 is an enlarged sectional view of the main part of FIG. 4. 1... Open/close valve, 2... Channel, 4... Valve seat, 5... Valve body,
7... Valve shaft, 8... Drive section, 9... Seal member, 12...
Space part, 15... Vacuum piping, 16... O ring, 26
...Leak gas suction device, 27, 28...Through hole, 29
...Communication path, 30...Rotary joint, S...Vacuum source.
Claims (1)
にＯリング１６を嵌着し、このＯリング１６によ
り弁体５と弁座４との間をシールする開閉弁１で
あつて、前記弁座４と、この弁座４を挿通する弁
軸７との間をシールするシール部材９を有し、こ
のシール部材９を設置するために形成した空間部
１２内のガスを真空源Ｓにより吸引するようにし
たリークガス吸引装置において、前記弁軸７の軸
線に沿うようにこの弁軸７内に連通路２９を形成
し、この連通路２９の一端を前記空間部１２に、
他端をロータリジヨイント３０を介して真空源Ｓ
に連通するように構成した開閉弁のリークガス吸
引装置。 The on-off valve 1 has an O-ring 16 fitted around the outer periphery of a valve body 5 that opens and closes a flow path 2 through which gas flows, and seals between the valve body 5 and the valve seat 4 with the O-ring 16, It has a sealing member 9 that seals between the valve seat 4 and the valve shaft 7 that passes through the valve seat 4, and the gas in the space 12 formed to install the sealing member 9 is removed by a vacuum source S. In the leak gas suction device configured to suck gas, a communication passage 29 is formed in the valve shaft 7 along the axis of the valve shaft 7, and one end of the communication passage 29 is connected to the space 12.
Connect the other end to the vacuum source S via the rotary joint 30.
A leak gas suction device with an on-off valve configured to communicate with the
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4138985U JPH0135099Y2 (en) | 1985-03-22 | 1985-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4138985U JPH0135099Y2 (en) | 1985-03-22 | 1985-03-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61157776U true JPS61157776U (en) | 1986-09-30 |
| JPH0135099Y2 JPH0135099Y2 (en) | 1989-10-25 |
Family
ID=30551166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4138985U Expired JPH0135099Y2 (en) | 1985-03-22 | 1985-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0135099Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152771A (en) * | 1986-12-06 | 1988-06-25 | ロールス・ロイス・ピーエルシー | Brush seal |
| JP2010159829A (en) * | 2009-01-08 | 2010-07-22 | Toshiba Corp | Steam valve device, and power generating facility equipped with the same |
-
1985
- 1985-03-22 JP JP4138985U patent/JPH0135099Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63152771A (en) * | 1986-12-06 | 1988-06-25 | ロールス・ロイス・ピーエルシー | Brush seal |
| JP2010159829A (en) * | 2009-01-08 | 2010-07-22 | Toshiba Corp | Steam valve device, and power generating facility equipped with the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0135099Y2 (en) | 1989-10-25 |