JPS61157328U - - Google Patents

Info

Publication number
JPS61157328U
JPS61157328U JP1985038780U JP3878085U JPS61157328U JP S61157328 U JPS61157328 U JP S61157328U JP 1985038780 U JP1985038780 U JP 1985038780U JP 3878085 U JP3878085 U JP 3878085U JP S61157328 U JPS61157328 U JP S61157328U
Authority
JP
Japan
Prior art keywords
reticle
fixing
transport mechanism
moving
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985038780U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985038780U priority Critical patent/JPS61157328U/ja
Publication of JPS61157328U publication Critical patent/JPS61157328U/ja
Pending legal-status Critical Current

Links

JP1985038780U 1985-03-20 1985-03-20 Pending JPS61157328U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985038780U JPS61157328U (US06650917-20031118-M00005.png) 1985-03-20 1985-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985038780U JPS61157328U (US06650917-20031118-M00005.png) 1985-03-20 1985-03-20

Publications (1)

Publication Number Publication Date
JPS61157328U true JPS61157328U (US06650917-20031118-M00005.png) 1986-09-30

Family

ID=30546102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985038780U Pending JPS61157328U (US06650917-20031118-M00005.png) 1985-03-20 1985-03-20

Country Status (1)

Country Link
JP (1) JPS61157328U (US06650917-20031118-M00005.png)

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