JPS61157326U - - Google Patents
Info
- Publication number
- JPS61157326U JPS61157326U JP4110885U JP4110885U JPS61157326U JP S61157326 U JPS61157326 U JP S61157326U JP 4110885 U JP4110885 U JP 4110885U JP 4110885 U JP4110885 U JP 4110885U JP S61157326 U JPS61157326 U JP S61157326U
- Authority
- JP
- Japan
- Prior art keywords
- container
- sealing member
- vapor phase
- pressurizing
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 5
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4110885U JPS61157326U (enExample) | 1985-03-22 | 1985-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4110885U JPS61157326U (enExample) | 1985-03-22 | 1985-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157326U true JPS61157326U (enExample) | 1986-09-30 |
Family
ID=30550624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4110885U Pending JPS61157326U (enExample) | 1985-03-22 | 1985-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157326U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01215792A (ja) * | 1988-02-23 | 1989-08-29 | Toshiba Mach Co Ltd | 気相成長装置におけるウエハ加熱方法および装置 |
| JPH09283450A (ja) * | 1996-04-15 | 1997-10-31 | Toshiba Mach Co Ltd | 気相成長装置 |
-
1985
- 1985-03-22 JP JP4110885U patent/JPS61157326U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01215792A (ja) * | 1988-02-23 | 1989-08-29 | Toshiba Mach Co Ltd | 気相成長装置におけるウエハ加熱方法および装置 |
| JPH09283450A (ja) * | 1996-04-15 | 1997-10-31 | Toshiba Mach Co Ltd | 気相成長装置 |