JPS61157314A - Apparatus for filtering liquid - Google Patents

Abstract

PURPOSE:To continuously and efficiently filtering particles in a liquid for a long time, by providing a mechanism for removing the adhered and accumulated substance on wind-up filter paper in a tank and providing a reversibly rotatable drive mechanism to a filter paper cylinder and a wind-up shaft. CONSTITUTION:A cut waste removing mechanism 9 for removing the cut waste accumulated to the surface of filter paper 1 is provided to the part of the filter paper 1 between a drain cylinder 5 having a filter paper cylinder 7 mounted thereto and a wind-up shaft 8 of used filter paper and, at the same time, compressed air is injected, for example, from the supply port 4b of the tank 4 to form the excluding space 10 of a liquid to be filtered while a part of the wind-up filter paper 1 and the above mentioned mechanism 9 are positioned in said space 10. When it is detected that the pressure loss of the filter paper cylinder 7 has reached a predetermined value by the accumulation of cut waste, the filter paper 1 is wound up by the wind-up shaft 8 while regenerated by removing accumulated cut waste on the surface of the filter paper 1 by the above mentioned mechanism 9.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a liquid filtration device that can efficiently filter particles in a liquid continuously for a long period of time.

(Prior art and its problems) When manufacturing small semiconductor manufacturing equipment such as LSI, a round bar-shaped semiconductor material is cut to create a disk-shaped substrate, and each of the disk-shaped substrates is divided into many rectangular sections, each of which has a semiconductor circuit. After forming the cutter (2), the cutter (2) is used to make the cut.By the way, in this case, cutting is done while applying water to the cutting part (C2). As a result, a large amount of semiconductor material cutting waste with a diameter of about 0.3 to 1 μm is contained, and in addition, if the semiconductor substrate material is gallium arsenide, it contains harmful substances and should be directly drained. Moreover, since the amount of water is extremely large, it is strongly desired that the water can be circulated and used again without draining.

Therefore, for example, the well-known coagulation-sedimentation method, the first factor (:
A method using a filter paper as shown, that is, one end of the filter paper (1) wound into a roll is placed in the water passage part (21(:),
Attempts have been made to wind up the filter paper (1) onto the roll (3) side when cutting debris accumulates on the filter paper and perform filtration with a new paper. However, the precipitation method is troublesome to process.]
Or, it is difficult to reuse the basolateral surface due to insufficient processing. In addition, the method using filter paper can achieve considerable results by using high-performance filter paper, but it is impossible to avoid some of the cutting debris passing through the filter paper due to water pressure and exiting to the drainage side. Filtration performance cannot be obtained. For this reason, it is insufficient for water that is required to have as few impurities as possible (
) Difficult to reuse. In addition, since the filtration area cannot be made large, the filter paper must be replaced within a short period of time, so it is either impossible to perform continuous filtration for a long time (1), or the troublesome work of replacing the filter paper is required. However, these methods have not yet met the requirements.

Therefore, the present inventor proposed the following liquid filtration device.

As shown in the cross-sectional side views shown in FIGS. 2(a) and 2(b) and the cross-sectional view taken along the line A-A, this device has a drain port (5a) held so as to pass through the tank (4). Drain pipe with (5
) with one fixed holding collar (5b) and the other removable holding collar (5C), the filter paper tube (7), that is, the filter paper (1) can be rolled into a roll using the packing (6). Holding the filter paper cylinder (7) formed by rolling it up, the liquid to be filtered sent from the tank (4) (two inlets (4a)) is passed from the outer circumferential side of the filter paper cylinder (7) to the inner circumferential surface. side (filter through two streams.

On the other hand, a winding shaft (8) is installed inside the tank (4), and one end of the winding shaft (8), which passes through the tank (4) in an airtight manner, is rotated by a motor with a speed reducer, and holds the winding end of the filter paper fl) (8a). ) and the retaining collar (8b), which is made to be removable and hangs (2).

When the pressure loss increases due to the accumulation of cutting debris on the outer peripheral surface, the filter paper is wound up to continue filtration with a new filter paper.

If a filter paper cylinder (7) is used as in this device, the filter paper (1) is wound up so that the outer circumferential surface (huff a) is left at the end, which prevents cutting waste from leaking to the drainage side. Perfect (=can be filtered.) Also, the filter paper is rolled into a cylindrical shape, and the entire outer peripheral surface of the filter paper tube (7) is used for filtration.

Therefore, compared to the conventional device shown in Figure 1, the filtration capacity can be increased, making continuous filtration possible for a long time (
2. The advantage is that the number of times the filter paper tube (7) needs to be replaced can be reduced and the trouble required for replacement can be reduced.
Water that contains 30,000 to 50,000 pieces of cutting waste per 10 cc can be purified to about 1000 to 3000 pieces per 10 cc (: At the same time, continuous filtration for several hundred hours is possible. You can gain benefits that would otherwise be impossible to obtain.

However, in semiconductor manufacturing factories, it takes two hours to replace the filter paper cylinder, and moreover, the used filter paper has accumulated cutting debris (it weighs considerably more than two, for example, about 10 times the weight before filtration), so it cannot be replaced. Since this is somewhat difficult, there is a strong demand for filtering for a longer period of time without having to be replaced.

The present invention has been made for the purpose of providing a liquid filtration device that meets the above-mentioned demands, and will next be described in detail with reference to the drawings.

[Structure of the invention]

(Summary of the invention) The features of the present invention are as shown in FIG. 3 (1:+li:,
As shown in the cross-sectional view (the same reference numerals as in FIG. 2 indicate the same parts), the filter paper (1 ) is provided with a cutting waste removing mechanism (9) for removing cutting waste accumulated on the surface of the filter paper, and at the same time, pressurization is applied from, for example, the feed port (4b) of the tank (4).

Then, when it is detected that the pressure loss of the filter paper tube (7) has reached a predetermined value (from the second point), the accumulation of cutting debris (in the exclusion space αG) (
While removing and regenerating the accumulated cutting debris on the surface of the filter paper using the cutting debris removal mechanism (9) provided in 2), the winding shaft (8) (2) winds up the filter paper as shown by the solid line in the figure. Tube (7)
When the filter paper is wound up with the backup protective layer (7a) left behind, the filter paper wound on the winding shaft (8) is wound back toward the drainage tube (5) as shown by the dotted line arrow in the figure, and filtration is performed again. It is characterized by having a C2 configuration.

Then, the filter paper can be used repeatedly to reduce the number of replacements, and at the same time, cutting debris accumulated on the filter paper in the exclusion space of the filtered liquid is removed (secondly, the removed cutting debris is in the filtered liquid (= The filter paper is filtered by filtration without being dissolved again and contamination of the filter paper is reduced, thereby reducing the number of replacements.

Next, an example will be explained.

(Embodiment) FIGS. 3(a) and 3(b) are a sectional side view and a sectional view taken along the line A-A of the embodiment of the present invention.

In the figure, (4) is the tank, (4a) is the filtrate inlet, (4
b) is the pressurized air inlet, and the tank (
4) Inside (= Creates a filtrate exclusion space αO. (5) is a drain pipe, one end of which protrudes by rotating to keep the wall of tank (4) watertight. (5a) is a drain port. , (5b) (5c
) is a holding collar, and (6) is a gasket to close both end surfaces of the filter paper tube (7).

(8) is the winding shaft, (8a) is the holding collar and the winding shaft (8)
One end of the tank (4) protrudes out of the tank (4) while maintaining watertightness as if rotating. αυ is a forward/reverse motor, for example a gear (lla)
The drain tube (5) and the winding shaft (8) are simultaneously rotated in the same direction and in the opposite direction by a positive Δ. (11 is a filter paper, and one side is a filter paper cylinder (7
) to form a drain tube (
5), and the winding end is fixed to the winding shaft (8). +13 is the guide roller for the filter paper, and the drain pipe (5)
Apply appropriate tension to the filter paper (1) between the winding shaft (8) and the wave source filtrate removal space aυ (2).
) is the cutting waste removal mechanism, (9a) is the drive roller, (9b)
is a driven roller, and (9C) is a rationally made belt for removing cutting waste, which is formed so as to rotate in contact with the filter paper (1) by the driving roller (9a) and driven roller (9b).

(9d) is a storage box for removed cutting waste, one end of which is fixed in the tank (4) and a driving roller (Ja) and a driven roller (9b).
located between. α is a drive motor, which is connected to the shaft (-) of the roller (9a) which passes airtight through the wall of the tank (4), and is connected to the winding shaft (8) (= the winding direction of the filter paper (1) (in the figure). solid line arrow) and the opposite direction (dotted line arrow in the figure) (wire mesh bell) (9
c) Rotate. I is a pressure loss detector that controls the forward/reverse motor aυ and detects when the pressure loss reaches a predetermined value.
At the same time, the filter paper is wound up by rotating the drain tube (5) and the winding shaft (8).
Activate the filter and remove cutting debris from the top of the filter paper (1). a!
9 is a backup protective layer detector, and the filter paper tube (7) of the drain tube (5)
The film is wound onto the winding shaft (8) to a thickness that is necessary for backup protection, and the filtration is restarted.

(Other Embodiments) FIG. 4 is a sectional view showing another embodiment of the present invention. In this example, the winding shaft (8) is used as a drain pipe αe having a drain port (16a), and at the same time A switching cock aη for the first drain pipe (5) and the second drain pipe αe is provided, and the first drain pipe (5) is initially
5) Wind the filter paper tube (7a) on the second drain tube α ring (twice) while filtering, and when the winding to the second drain tube αQ is finished, turn the cock (Iη into the second drain tube o). The pass side (- is switched to perform filtration while winding the filter paper tube (7b) to the first drain tube (5) side. In this case, the wire mesh bell for removing cutting waste) (9c) It goes without saying that cutting debris is removed by operating each time the winding is carried into the second drain pipe Q[9 and the first drain pipe (5), and this method is similar to the third one. A double version of the configuration shown in the figure (equivalent to two).

In addition, in the above description, the filtrate removal space α1 is provided in the tank (4), and the filter paper (1) is regenerated by the removal mechanism (9), but the wave source filtrate removal space αG is provided. It is also possible to regenerate the filter paper by leaving it in the filtrate without removing it.In this case, the removed cuttings etc. enter the filtrate in the tank, which puts a slight burden on the filter paper. To increase.

[Brief explanation of the drawing]

Figures 1 and 2 are examples of conventional equipment, and Figure 3 (a) (
1)) is a cross-sectional side view showing one embodiment of the present invention and a cross-sectional view taken along the line A--A, and FIG. 4 is a cross-sectional side view of another embodiment of the present invention. (1)...Filter paper, (2)...Water passage section, (3
)...roll, (4)...one tank, (4a)...
... Inlet of the liquid to be filtered, (4b) ... Pressurized air inlet, (5) ... Drain pipe, (5a) ... Drain port, (5b) (5c) ...・・Holding guard, (5d)・・
・・Outlet of filtered liquid, (6)---Putskin,
(7) ('7a) (7b) ----Filter paper tube, (8
)... Winding shaft, (8a) (8b)... Holding collar, (9)... Cutting debris removal mechanism, (9a)...
... Drive roller, (9b) ... Driven roller,
(9C)...Wire mesh belt, (9d)...Cut waste collection box, αO...Permeate liquid removal space, αυ...Forward/reverse motor, az...Filter paper guide Laura, (13...
・Drive motor, ■...Pressure loss detector, Kasumi...Backup protective layer detector, +l [9...Second
Drain pipe, (16a)...Drain port, αD...Switching cock.

Claims (1)

[Scope of Claims] The liquid to be filtered is passed from the outer peripheral surface to the inner peripheral surface of the filter paper cylinder to perform filtration when the pressure loss of the filter paper cylinder increases. In a liquid filtration device that continues filtration by winding up a filter paper from the outer circumferential side of a filter paper cylinder using a winding shaft, a mechanism for removing deposits from the winding filter paper is provided in a tank in which the filter paper cylinder and the winding shaft are provided. The filter paper tube and the winding shaft are provided with a forward and reverse rotation drive mechanism, and the filter paper is wound on the winding shaft while being regenerated, and when filtration by the filter paper tube is completed, the above A liquid filtration device characterized in that the recycled filter paper on the winding shaft is rewound to perform filtration again.