JPS61156736U - - Google Patents
Info
- Publication number
- JPS61156736U JPS61156736U JP4008185U JP4008185U JPS61156736U JP S61156736 U JPS61156736 U JP S61156736U JP 4008185 U JP4008185 U JP 4008185U JP 4008185 U JP4008185 U JP 4008185U JP S61156736 U JPS61156736 U JP S61156736U
- Authority
- JP
- Japan
- Prior art keywords
- coil spring
- coil
- mounting structure
- contact
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 description 4
Landscapes
- Springs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4008185U JPH0313636Y2 (uk) | 1985-03-20 | 1985-03-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4008185U JPH0313636Y2 (uk) | 1985-03-20 | 1985-03-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61156736U true JPS61156736U (uk) | 1986-09-29 |
JPH0313636Y2 JPH0313636Y2 (uk) | 1991-03-28 |
Family
ID=30548639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4008185U Expired JPH0313636Y2 (uk) | 1985-03-20 | 1985-03-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0313636Y2 (uk) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3565496B2 (ja) * | 2000-04-13 | 2004-09-15 | イビデン株式会社 | セラミックヒータ、静電チャックおよびウエハプローバ |
-
1985
- 1985-03-20 JP JP4008185U patent/JPH0313636Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0313636Y2 (uk) | 1991-03-28 |
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