JPS61156583U - - Google Patents

Info

Publication number
JPS61156583U
JPS61156583U JP3953385U JP3953385U JPS61156583U JP S61156583 U JPS61156583 U JP S61156583U JP 3953385 U JP3953385 U JP 3953385U JP 3953385 U JP3953385 U JP 3953385U JP S61156583 U JPS61156583 U JP S61156583U
Authority
JP
Japan
Prior art keywords
shower
chamber
box
cleaning nozzle
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3953385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3953385U priority Critical patent/JPS61156583U/ja
Publication of JPS61156583U publication Critical patent/JPS61156583U/ja
Pending legal-status Critical Current

Links

JP3953385U 1985-03-19 1985-03-19 Pending JPS61156583U (is)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3953385U JPS61156583U (is) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3953385U JPS61156583U (is) 1985-03-19 1985-03-19

Publications (1)

Publication Number Publication Date
JPS61156583U true JPS61156583U (is) 1986-09-29

Family

ID=30547565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3953385U Pending JPS61156583U (is) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPS61156583U (is)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842839B1 (is) * 1970-01-26 1973-12-14
JPS5243163U (is) * 1975-09-23 1977-03-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4842839B1 (is) * 1970-01-26 1973-12-14
JPS5243163U (is) * 1975-09-23 1977-03-26

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