JPS61156462U - - Google Patents

Info

Publication number

JPS61156462U

JPS61156462U JP3828885U JP3828885U JPS61156462U JP S61156462 U JPS61156462 U JP S61156462U JP 3828885 U JP3828885 U JP 3828885U JP 3828885 U JP3828885 U JP 3828885U JP S61156462 U JPS61156462 U JP S61156462U

Authority

JP

Japan

Prior art keywords

gas

closing plate

chamber

shutter closing

inspection window

Prior art date

1985-03-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 3
• 238000001035 drying Methods 0.000 claims description 3
• 238000007689 inspection Methods 0.000 claims description 3
• 239000002274 desiccant Substances 0.000 claims description 2
• 238000010586 diagram Methods 0.000 description 1
• 239000011521 glass Substances 0.000 description 1