JPS61156231U - - Google Patents

Info

Publication number
JPS61156231U
JPS61156231U JP3911385U JP3911385U JPS61156231U JP S61156231 U JPS61156231 U JP S61156231U JP 3911385 U JP3911385 U JP 3911385U JP 3911385 U JP3911385 U JP 3911385U JP S61156231 U JPS61156231 U JP S61156231U
Authority
JP
Japan
Prior art keywords
adjustment means
spin coater
workpiece
container
rotary table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3911385U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3911385U priority Critical patent/JPS61156231U/ja
Publication of JPS61156231U publication Critical patent/JPS61156231U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3911385U 1985-03-18 1985-03-18 Pending JPS61156231U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3911385U JPS61156231U (US20030199744A1-20031023-C00003.png) 1985-03-18 1985-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3911385U JPS61156231U (US20030199744A1-20031023-C00003.png) 1985-03-18 1985-03-18

Publications (1)

Publication Number Publication Date
JPS61156231U true JPS61156231U (US20030199744A1-20031023-C00003.png) 1986-09-27

Family

ID=30546758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3911385U Pending JPS61156231U (US20030199744A1-20031023-C00003.png) 1985-03-18 1985-03-18

Country Status (1)

Country Link
JP (1) JPS61156231U (US20030199744A1-20031023-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02144169A (ja) * 1988-11-25 1990-06-01 Hitachi Ltd 塗布装置
JP2012061387A (ja) * 2010-09-14 2012-03-29 Japancreate Co Ltd スピンコータ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02144169A (ja) * 1988-11-25 1990-06-01 Hitachi Ltd 塗布装置
JP2012061387A (ja) * 2010-09-14 2012-03-29 Japancreate Co Ltd スピンコータ

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