JPS61155778U - - Google Patents
Info
- Publication number
- JPS61155778U JPS61155778U JP3943185U JP3943185U JPS61155778U JP S61155778 U JPS61155778 U JP S61155778U JP 3943185 U JP3943185 U JP 3943185U JP 3943185 U JP3943185 U JP 3943185U JP S61155778 U JPS61155778 U JP S61155778U
- Authority
- JP
- Japan
- Prior art keywords
- air
- hollow member
- test head
- cooling
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 6
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3943185U JPS61155778U (uk) | 1985-03-19 | 1985-03-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3943185U JPS61155778U (uk) | 1985-03-19 | 1985-03-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61155778U true JPS61155778U (uk) | 1986-09-27 |
Family
ID=30547367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3943185U Pending JPS61155778U (uk) | 1985-03-19 | 1985-03-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155778U (uk) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63164442A (ja) * | 1986-12-26 | 1988-07-07 | Tokyo Electron Ltd | プローバ |
-
1985
- 1985-03-19 JP JP3943185U patent/JPS61155778U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63164442A (ja) * | 1986-12-26 | 1988-07-07 | Tokyo Electron Ltd | プローバ |