JPS61155720U - - Google Patents

Info

Publication number
JPS61155720U
JPS61155720U JP3934185U JP3934185U JPS61155720U JP S61155720 U JPS61155720 U JP S61155720U JP 3934185 U JP3934185 U JP 3934185U JP 3934185 U JP3934185 U JP 3934185U JP S61155720 U JPS61155720 U JP S61155720U
Authority
JP
Japan
Prior art keywords
displacement detection
signal
detection
optical grating
reference mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3934185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421072Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985039341U priority Critical patent/JPH0421072Y2/ja
Publication of JPS61155720U publication Critical patent/JPS61155720U/ja
Application granted granted Critical
Publication of JPH0421072Y2 publication Critical patent/JPH0421072Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1985039341U 1985-03-19 1985-03-19 Expired JPH0421072Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985039341U JPH0421072Y2 (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985039341U JPH0421072Y2 (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Publications (2)

Publication Number Publication Date
JPS61155720U true JPS61155720U (enrdf_load_stackoverflow) 1986-09-27
JPH0421072Y2 JPH0421072Y2 (enrdf_load_stackoverflow) 1992-05-14

Family

ID=30547204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985039341U Expired JPH0421072Y2 (enrdf_load_stackoverflow) 1985-03-19 1985-03-19

Country Status (1)

Country Link
JP (1) JPH0421072Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012103230A (ja) * 2010-11-15 2012-05-31 Seiko Npc Corp 光学式エンコーダ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810017U (ja) * 1981-07-14 1983-01-22 株式会社 三豊製作所 光電型エンコ−ダの零点検出装置
JPS5822914A (ja) * 1981-08-04 1983-02-10 Mitsutoyo Mfg Co Ltd 光電型エンコ−ダの零点検出装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810017U (ja) * 1981-07-14 1983-01-22 株式会社 三豊製作所 光電型エンコ−ダの零点検出装置
JPS5822914A (ja) * 1981-08-04 1983-02-10 Mitsutoyo Mfg Co Ltd 光電型エンコ−ダの零点検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012103230A (ja) * 2010-11-15 2012-05-31 Seiko Npc Corp 光学式エンコーダ

Also Published As

Publication number Publication date
JPH0421072Y2 (enrdf_load_stackoverflow) 1992-05-14

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