JPS61155376U - - Google Patents
Info
- Publication number
- JPS61155376U JPS61155376U JP3631685U JP3631685U JPS61155376U JP S61155376 U JPS61155376 U JP S61155376U JP 3631685 U JP3631685 U JP 3631685U JP 3631685 U JP3631685 U JP 3631685U JP S61155376 U JPS61155376 U JP S61155376U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- heater
- electric furnace
- generating electric
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims description 2
- 239000006260 foam Substances 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案による分子線発生電気炉の一実
施例の概略断面図であり、第２図は従来の分子線
発生電気炉の概略断面図である。図において、
１……原料、２……ルツボ、３……抵抗加熱ヒ
ータ、４……付着物、５……泡、６……熱しやへ
い板、７……熱電対、８……上部抵抗加熱ヒータ
である。
FIG. 1 is a schematic sectional view of an embodiment of a molecular beam generating electric furnace according to the present invention, and FIG. 2 is a schematic sectional view of a conventional molecular beam generating electric furnace. In the figure, 1... raw material, 2... crucible, 3... resistance heater, 4... deposit, 5... foam, 6... heat-resistant plate, 7... thermocouple, 8... upper resistance It is a heating heater.
Claims (1)
気炉において、前記ヒータが分子線原料を入れる
ルツボの分子線出口近傍のみに設けてあることを
特徴とする分子線発生電気炉。 A molecular beam generating electric furnace using a resistance heater as a heating means, characterized in that the heater is provided only near a molecular beam outlet of a crucible containing a molecular beam raw material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3631685U JPS61155376U (en) | 1985-03-14 | 1985-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3631685U JPS61155376U (en) | 1985-03-14 | 1985-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61155376U true JPS61155376U (en) | 1986-09-26 |
Family
ID=30541377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3631685U Pending JPS61155376U (en) | 1985-03-14 | 1985-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155376U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59172715A (en) * | 1983-03-22 | 1984-09-29 | Nec Corp | Molecular beam generating equipment |
-
1985
- 1985-03-14 JP JP3631685U patent/JPS61155376U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59172715A (en) * | 1983-03-22 | 1984-09-29 | Nec Corp | Molecular beam generating equipment |