JPS61155368U - - Google Patents
Info
- Publication number
- JPS61155368U JPS61155368U JP3724885U JP3724885U JPS61155368U JP S61155368 U JPS61155368 U JP S61155368U JP 3724885 U JP3724885 U JP 3724885U JP 3724885 U JP3724885 U JP 3724885U JP S61155368 U JPS61155368 U JP S61155368U
- Authority
- JP
- Japan
- Prior art keywords
- container
- vacuum
- processing apparatus
- sectional
- rotated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008021 deposition Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3724885U JPS61155368U (enExample) | 1985-03-14 | 1985-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3724885U JPS61155368U (enExample) | 1985-03-14 | 1985-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61155368U true JPS61155368U (enExample) | 1986-09-26 |
Family
ID=30543161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3724885U Pending JPS61155368U (enExample) | 1985-03-14 | 1985-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155368U (enExample) |
-
1985
- 1985-03-14 JP JP3724885U patent/JPS61155368U/ja active Pending