JPS61155073U - - Google Patents

Info

Publication number
JPS61155073U
JPS61155073U JP3891785U JP3891785U JPS61155073U JP S61155073 U JPS61155073 U JP S61155073U JP 3891785 U JP3891785 U JP 3891785U JP 3891785 U JP3891785 U JP 3891785U JP S61155073 U JPS61155073 U JP S61155073U
Authority
JP
Japan
Prior art keywords
chamber
valve
provided inside
seated
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3891785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3891785U priority Critical patent/JPS61155073U/ja
Publication of JPS61155073U publication Critical patent/JPS61155073U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3891785U 1985-03-20 1985-03-20 Pending JPS61155073U (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3891785U JPS61155073U (US07652168-20100126-C00068.png) 1985-03-20 1985-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3891785U JPS61155073U (US07652168-20100126-C00068.png) 1985-03-20 1985-03-20

Publications (1)

Publication Number Publication Date
JPS61155073U true JPS61155073U (US07652168-20100126-C00068.png) 1986-09-26

Family

ID=30546373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3891785U Pending JPS61155073U (US07652168-20100126-C00068.png) 1985-03-20 1985-03-20

Country Status (1)

Country Link
JP (1) JPS61155073U (US07652168-20100126-C00068.png)

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