JPS61154369U - - Google Patents
Info
- Publication number
- JPS61154369U JPS61154369U JP3790985U JP3790985U JPS61154369U JP S61154369 U JPS61154369 U JP S61154369U JP 3790985 U JP3790985 U JP 3790985U JP 3790985 U JP3790985 U JP 3790985U JP S61154369 U JPS61154369 U JP S61154369U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- valve
- valve body
- inlet port
- outlet port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Lift Valve (AREA)
Description
第１図および第２図は、本考案に係るポペツト
弁の構造および動作態様を示す断面側面図であり
、第３図は半導体ウエハの洗浄システムを概念的
に示した図である。
１……ポペツト弁、２……ハウジング、６……
弁座、８……インレツトポート、９……アウトレ
ツトポート、１０……弁体、２３……通路、２４
……Ｏリング。
1 and 2 are cross-sectional side views showing the structure and operating mode of the poppet valve according to the present invention, and FIG. 3 is a diagram conceptually showing a semiconductor wafer cleaning system. 1...Poppet valve, 2...Housing, 6...
Valve seat, 8... Inlet port, 9... Outlet port, 10... Valve body, 23... Passage, 24
...O-ring.
Claims (1)
ジング側の弁座に当接させることにより、上記ハ
ウジングに設けられたインレツトポートとアウト
レツトポート間を閉止するポペツト弁において、
上記弁体に、上記Ｏリングを横切り、かつ該Ｏリ
ングに対してインレツトポート側とアウトレツト
ポート側とに開口する通路を形成し、上記弁体が
閉止位置にあるとき、上記通路のみを介してイン
レツトポートとアウトレツトポートとを連通する
ようにしたことを特徴とするポペツト弁。 A poppet valve that closes between an inlet port and an outlet port provided in the housing by fitting an O-ring to the valve body and bringing the O-ring into contact with a valve seat on the housing side,
A passage is formed in the valve body that crosses the O-ring and opens to the inlet port side and the outlet port side with respect to the O-ring, and when the valve body is in the closed position, only the passage is formed. A poppet valve characterized in that an inlet port and an outlet port communicate with each other through a poppet valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3790985U JPS61154369U (en) | 1985-03-15 | 1985-03-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3790985U JPS61154369U (en) | 1985-03-15 | 1985-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61154369U true JPS61154369U (en) | 1986-09-25 |
Family
ID=30544424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3790985U Pending JPS61154369U (en) | 1985-03-15 | 1985-03-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61154369U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011111773A1 (en) * | 2010-03-10 | 2011-09-15 | カヤバ工業株式会社 | Damping valve |
| JP2011185390A (en) * | 2010-03-10 | 2011-09-22 | Kyb Co Ltd | Damping valve |
| JP2011185391A (en) * | 2010-03-10 | 2011-09-22 | Kyb Co Ltd | Damping valve |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351451U (en) * | 1976-10-05 | 1978-05-01 |
-
1985
- 1985-03-15 JP JP3790985U patent/JPS61154369U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351451U (en) * | 1976-10-05 | 1978-05-01 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011111773A1 (en) * | 2010-03-10 | 2011-09-15 | カヤバ工業株式会社 | Damping valve |
| JP2011185390A (en) * | 2010-03-10 | 2011-09-22 | Kyb Co Ltd | Damping valve |
| JP2011185391A (en) * | 2010-03-10 | 2011-09-22 | Kyb Co Ltd | Damping valve |
| US8944222B2 (en) | 2010-03-10 | 2015-02-03 | Kayaba Industry Co., Ltd. | Damping valve |