JPS61152575A - Housing vessel for negative plate - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Field of the Invention] The present invention relates to a container for storing a photographic original plate such as a mask or reticle used in a semiconductor exposure apparatus, and in particular to a container that is partially or completely transparent. The present invention relates to a photographic original storage container in which original information such as the original number and identification mark of a photographic original inside the container can be checked from outside the container.

[Description of prior art] IC, LS 1. VLS IJ(7) Half L([1(7)
A photographic original plate (mask or reticle) used for In is generally attached with original plate information such as an original plate number and an identification mark for identifying the photographic original plate.

Such photographic original plates (hereinafter referred to as original plates) have minute patterns formed on them, and if even a small amount of dust adheres to them, it can seriously affect the performance of semiconductor devices manufactured using the original plate. Therefore, it is usually stored in a container when not in use, ie, during transportation and storage.

By the way, conventional photographic original storage containers were made of opaque material, so in order to identify the originals stored in the container, one had to remove the lid of the storage container or remove the original from the container and attach it to the original. It was necessary to confirm the original plate information such as the original plate number and identification mark. That is, in the past, it took time and effort to identify the original plate, and the original plate was exposed to the outside air during confirmation, which increased the chances of dust adhering to it. Therefore, as a countermeasure in such cases, labels with numbers and identification marks of the originals to be stored are pasted on storage shelves and containers, but such labels tend to get dirty or peel off. In addition, if an original is stored in the wrong shelf or container, it is necessary to check the original in many containers until the original is found, which is time-consuming and creates the opportunity for dust to adhere to the original. There was a possibility.

[Object of the Invention] The present invention enables information on the mask to be confirmed even when the photo original, for example, a mask, is in a storage container, minimizes the chance of dust adhering to the mask, and furthermore prevents the user from attaching the wrong mask to the mask changer. To provide a mask storage container that prevents such problems from occurring.

[Structure and operation of the invention 1] To explain the present invention with reference to drawings, a storage container 1 is formed of a transparent material such as resin or glass, and a photographic original plate 2 having original plate information such as an original plate number or an identification mark 3 is stored therein. .

Therefore, even when the photographic original 2 is stored in the storage container 1, the original information 3 can be checked from outside the container 1 by looking through it.

The storage container of the present invention does not necessarily need to be entirely transparent; it is sufficient to make only a portion of the container transparent so that the original plate number or identification mark of the photographic original plate can be confirmed from outside the container.

For example, a window may be opened directly above the original plate information 3, and this window may be covered with glass or transparent plastic.

[Effects of the Invention] As described above, in the present invention, a transparent see-through window is provided in the storage container for photographic originals, such as masks, and the entire storage container is made of a see-through material, making it easy to check the masks. This has the effect of minimizing the chance of dust adhering to the mask and preventing the wrong mask from being installed in the mask changer.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing a state in which photographic originals are stored in an original storage container according to an embodiment of the present invention. 1: Storage container, 2: Original photo plate, 3: Original plate information mark.

Claims (1)

[Claims] A storage container for photographic originals to which original information has been attached, in which a part or all of the container is made of a transparent material, so that the original information can be seen and confirmed from outside the storage container. A photo original storage container featuring: