JPS61151924U - - Google Patents
Info
- Publication number
- JPS61151924U JPS61151924U JP3318885U JP3318885U JPS61151924U JP S61151924 U JPS61151924 U JP S61151924U JP 3318885 U JP3318885 U JP 3318885U JP 3318885 U JP3318885 U JP 3318885U JP S61151924 U JPS61151924 U JP S61151924U
- Authority
- JP
- Japan
- Prior art keywords
- tunnel
- vector
- liquid
- filter
- conveying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 3
Landscapes
- Ventilation (AREA)
Description
第１図ａとｂは本考案実施例の正面図と側断面
図、第２図ａとｂは従来例の正面図と側断面図で
ある。
図中、１はトンネル、２はフイルタ、３はボー
ト、４はカセツト、５はウエハ、６は液体、７は
噴出孔、８はポンプ、をそれぞれ示す。
1A and 1B are a front view and a side sectional view of the embodiment of the present invention, and FIGS. 2A and 2B are a front view and a side sectional view of the conventional example. In the figure, 1 is a tunnel, 2 is a filter, 3 is a boat, 4 is a cassette, 5 is a wafer, 6 is a liquid, 7 is an ejection hole, and 8 is a pump.
Claims (1)
体をトンネル下方へ垂直方向に噴出し、トンネル
の底部において液体はベクトルをもつて流れ、流
動液体上を試料を収納した台をのせたボートを前
記ベクトル方向に流す構成としたことを特徴とす
る搬送装置。 Clean gas is ejected vertically from the top of the tunnel through a filter to the bottom of the tunnel, and at the bottom of the tunnel, the liquid flows in a vector direction, and a boat carrying a table containing a sample flows over the flowing liquid in the direction of the vector. A conveying device characterized by having the following configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3318885U JPS61151924U (en) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3318885U JPS61151924U (en) | 1985-03-08 | 1985-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151924U true JPS61151924U (en) | 1986-09-19 |
Family
ID=30535405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3318885U Pending JPS61151924U (en) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151924U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947457A (en) * | 1982-09-07 | 1984-03-17 | 株式会社島アイデア・センタ− | Preliminary needle selecting apparatus of presser jack in traverse knitting machine |
-
1985
- 1985-03-08 JP JP3318885U patent/JPS61151924U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5947457A (en) * | 1982-09-07 | 1984-03-17 | 株式会社島アイデア・センタ− | Preliminary needle selecting apparatus of presser jack in traverse knitting machine |
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