JPS61151328U - - Google Patents

Info

Publication number
JPS61151328U
JPS61151328U JP3587085U JP3587085U JPS61151328U JP S61151328 U JPS61151328 U JP S61151328U JP 3587085 U JP3587085 U JP 3587085U JP 3587085 U JP3587085 U JP 3587085U JP S61151328 U JPS61151328 U JP S61151328U
Authority
JP
Japan
Prior art keywords
cell body
actuating piece
molecular beam
open
jet nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3587085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3587085U priority Critical patent/JPS61151328U/ja
Publication of JPS61151328U publication Critical patent/JPS61151328U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3587085U 1985-03-12 1985-03-12 Pending JPS61151328U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3587085U JPS61151328U (enrdf_load_stackoverflow) 1985-03-12 1985-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3587085U JPS61151328U (enrdf_load_stackoverflow) 1985-03-12 1985-03-12

Publications (1)

Publication Number Publication Date
JPS61151328U true JPS61151328U (enrdf_load_stackoverflow) 1986-09-18

Family

ID=30540542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3587085U Pending JPS61151328U (enrdf_load_stackoverflow) 1985-03-12 1985-03-12

Country Status (1)

Country Link
JP (1) JPS61151328U (enrdf_load_stackoverflow)

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