JPS61150862U - - Google Patents
Info
- Publication number
- JPS61150862U JPS61150862U JP3247485U JP3247485U JPS61150862U JP S61150862 U JPS61150862 U JP S61150862U JP 3247485 U JP3247485 U JP 3247485U JP 3247485 U JP3247485 U JP 3247485U JP S61150862 U JPS61150862 U JP S61150862U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- provided around
- heater
- resistance heating
- pulling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000000155 melt Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 238000002844 melting Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985032474U JPH037405Y2 (US07135483-20061114-C00003.png) | 1985-03-06 | 1985-03-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985032474U JPH037405Y2 (US07135483-20061114-C00003.png) | 1985-03-06 | 1985-03-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61150862U true JPS61150862U (US07135483-20061114-C00003.png) | 1986-09-18 |
| JPH037405Y2 JPH037405Y2 (US07135483-20061114-C00003.png) | 1991-02-25 |
Family
ID=30534020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985032474U Expired JPH037405Y2 (US07135483-20061114-C00003.png) | 1985-03-06 | 1985-03-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH037405Y2 (US07135483-20061114-C00003.png) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03120569U (US07135483-20061114-C00003.png) * | 1990-03-15 | 1991-12-11 | ||
| JPH0656571A (ja) * | 1992-04-16 | 1994-03-01 | Sumitomo Metal Ind Ltd | 単結晶引き上げ時における単結晶酸素濃度の制御方法及び該方法に使用する結晶成長装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840666U (US07135483-20061114-C00003.png) * | 1971-09-16 | 1973-05-23 | ||
| JPS5345679A (en) * | 1976-10-08 | 1978-04-24 | Hitachi Ltd | Pulling-up apparatus for sillicon single crystal |
| JPS55126597A (en) * | 1979-03-23 | 1980-09-30 | Nec Corp | Single crystal growing method |
-
1985
- 1985-03-06 JP JP1985032474U patent/JPH037405Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4840666U (US07135483-20061114-C00003.png) * | 1971-09-16 | 1973-05-23 | ||
| JPS5345679A (en) * | 1976-10-08 | 1978-04-24 | Hitachi Ltd | Pulling-up apparatus for sillicon single crystal |
| JPS55126597A (en) * | 1979-03-23 | 1980-09-30 | Nec Corp | Single crystal growing method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03120569U (US07135483-20061114-C00003.png) * | 1990-03-15 | 1991-12-11 | ||
| JPH0656571A (ja) * | 1992-04-16 | 1994-03-01 | Sumitomo Metal Ind Ltd | 単結晶引き上げ時における単結晶酸素濃度の制御方法及び該方法に使用する結晶成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH037405Y2 (US07135483-20061114-C00003.png) | 1991-02-25 |
