JPS61150854U - - Google Patents
Info
- Publication number
- JPS61150854U JPS61150854U JP3459685U JP3459685U JPS61150854U JP S61150854 U JPS61150854 U JP S61150854U JP 3459685 U JP3459685 U JP 3459685U JP 3459685 U JP3459685 U JP 3459685U JP S61150854 U JPS61150854 U JP S61150854U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- scattered
- vacuum
- film
- particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3459685U JPS61150854U (enExample) | 1985-03-13 | 1985-03-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3459685U JPS61150854U (enExample) | 1985-03-13 | 1985-03-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61150854U true JPS61150854U (enExample) | 1986-09-18 |
Family
ID=30538112
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3459685U Pending JPS61150854U (enExample) | 1985-03-13 | 1985-03-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150854U (enExample) |
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1985
- 1985-03-13 JP JP3459685U patent/JPS61150854U/ja active Pending