JPS61150852U - - Google Patents
Info
- Publication number
- JPS61150852U JPS61150852U JP3500285U JP3500285U JPS61150852U JP S61150852 U JPS61150852 U JP S61150852U JP 3500285 U JP3500285 U JP 3500285U JP 3500285 U JP3500285 U JP 3500285U JP S61150852 U JPS61150852 U JP S61150852U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- mask
- forming
- workpiece
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 1
- 230000035699 permeability Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3500285U JPS61150852U (es) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3500285U JPS61150852U (es) | 1985-03-11 | 1985-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61150852U true JPS61150852U (es) | 1986-09-18 |
Family
ID=30538894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3500285U Pending JPS61150852U (es) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61150852U (es) |
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1985
- 1985-03-11 JP JP3500285U patent/JPS61150852U/ja active Pending