JPS61149329U - - Google Patents

Info

Publication number
JPS61149329U
JPS61149329U JP3124185U JP3124185U JPS61149329U JP S61149329 U JPS61149329 U JP S61149329U JP 3124185 U JP3124185 U JP 3124185U JP 3124185 U JP3124185 U JP 3124185U JP S61149329 U JPS61149329 U JP S61149329U
Authority
JP
Japan
Prior art keywords
wafer chuck
exposure machine
alignment exposure
receiving element
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3124185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3124185U priority Critical patent/JPS61149329U/ja
Publication of JPS61149329U publication Critical patent/JPS61149329U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP3124185U 1985-03-05 1985-03-05 Pending JPS61149329U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3124185U JPS61149329U (US20090163788A1-20090625-C00002.png) 1985-03-05 1985-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3124185U JPS61149329U (US20090163788A1-20090625-C00002.png) 1985-03-05 1985-03-05

Publications (1)

Publication Number Publication Date
JPS61149329U true JPS61149329U (US20090163788A1-20090625-C00002.png) 1986-09-16

Family

ID=30531668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3124185U Pending JPS61149329U (US20090163788A1-20090625-C00002.png) 1985-03-05 1985-03-05

Country Status (1)

Country Link
JP (1) JPS61149329U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011138058A (ja) * 2009-12-28 2011-07-14 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011138058A (ja) * 2009-12-28 2011-07-14 Hitachi High-Technologies Corp 露光装置、露光方法、及び表示用パネル基板の製造方法

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