JPS61149327U - - Google Patents
Info
- Publication number
- JPS61149327U JPS61149327U JP3158785U JP3158785U JPS61149327U JP S61149327 U JPS61149327 U JP S61149327U JP 3158785 U JP3158785 U JP 3158785U JP 3158785 U JP3158785 U JP 3158785U JP S61149327 U JPS61149327 U JP S61149327U
- Authority
- JP
- Japan
- Prior art keywords
- heat
- core tube
- housed
- rotating
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3158785U JPS61149327U (cs) | 1985-03-07 | 1985-03-07 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3158785U JPS61149327U (cs) | 1985-03-07 | 1985-03-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61149327U true JPS61149327U (cs) | 1986-09-16 |
Family
ID=30532319
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3158785U Pending JPS61149327U (cs) | 1985-03-07 | 1985-03-07 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61149327U (cs) |
-
1985
- 1985-03-07 JP JP3158785U patent/JPS61149327U/ja active Pending