JPS61148820U - - Google Patents
Info
- Publication number
- JPS61148820U JPS61148820U JP3397985U JP3397985U JPS61148820U JP S61148820 U JPS61148820 U JP S61148820U JP 3397985 U JP3397985 U JP 3397985U JP 3397985 U JP3397985 U JP 3397985U JP S61148820 U JPS61148820 U JP S61148820U
- Authority
- JP
- Japan
- Prior art keywords
- filter
- belt
- tank
- belt conveyor
- lower tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 3
- 239000007921 spray Substances 0.000 claims 2
- 239000000428 dust Substances 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3397985U JPS6341368Y2 (https=) | 1985-03-07 | 1985-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3397985U JPS6341368Y2 (https=) | 1985-03-07 | 1985-03-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61148820U true JPS61148820U (https=) | 1986-09-13 |
| JPS6341368Y2 JPS6341368Y2 (https=) | 1988-10-31 |
Family
ID=30536931
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3397985U Expired JPS6341368Y2 (https=) | 1985-03-07 | 1985-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6341368Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7138016B2 (en) | 1990-05-18 | 2006-11-21 | Semitool, Inc. | Semiconductor processing apparatus |
-
1985
- 1985-03-07 JP JP3397985U patent/JPS6341368Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7138016B2 (en) | 1990-05-18 | 2006-11-21 | Semitool, Inc. | Semiconductor processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341368Y2 (https=) | 1988-10-31 |