JPS61148820U - - Google Patents

Info

Publication number
JPS61148820U
JPS61148820U JP3397985U JP3397985U JPS61148820U JP S61148820 U JPS61148820 U JP S61148820U JP 3397985 U JP3397985 U JP 3397985U JP 3397985 U JP3397985 U JP 3397985U JP S61148820 U JPS61148820 U JP S61148820U
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JP
Japan
Prior art keywords
filter
belt
tank
belt conveyor
lower tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3397985U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6341368Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3397985U priority Critical patent/JPS6341368Y2/ja
Publication of JPS61148820U publication Critical patent/JPS61148820U/ja
Application granted granted Critical
Publication of JPS6341368Y2 publication Critical patent/JPS6341368Y2/ja
Expired legal-status Critical Current

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  • Cleaning By Liquid Or Steam (AREA)
JP3397985U 1985-03-07 1985-03-07 Expired JPS6341368Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3397985U JPS6341368Y2 (enrdf_load_stackoverflow) 1985-03-07 1985-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3397985U JPS6341368Y2 (enrdf_load_stackoverflow) 1985-03-07 1985-03-07

Publications (2)

Publication Number Publication Date
JPS61148820U true JPS61148820U (enrdf_load_stackoverflow) 1986-09-13
JPS6341368Y2 JPS6341368Y2 (enrdf_load_stackoverflow) 1988-10-31

Family

ID=30536931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3397985U Expired JPS6341368Y2 (enrdf_load_stackoverflow) 1985-03-07 1985-03-07

Country Status (1)

Country Link
JP (1) JPS6341368Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138016B2 (en) 1990-05-18 2006-11-21 Semitool, Inc. Semiconductor processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138016B2 (en) 1990-05-18 2006-11-21 Semitool, Inc. Semiconductor processing apparatus

Also Published As

Publication number Publication date
JPS6341368Y2 (enrdf_load_stackoverflow) 1988-10-31

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