JPS61148419A - Scanning rotary polygon mirror - Google Patents

Scanning rotary polygon mirror

Info

Publication number
JPS61148419A
JPS61148419A JP27087084A JP27087084A JPS61148419A JP S61148419 A JPS61148419 A JP S61148419A JP 27087084 A JP27087084 A JP 27087084A JP 27087084 A JP27087084 A JP 27087084A JP S61148419 A JPS61148419 A JP S61148419A
Authority
JP
Japan
Prior art keywords
rotating shaft
polygon mirror
rotating
scanning
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27087084A
Other languages
Japanese (ja)
Inventor
Shigeo Kato
加藤 重雄
Susumu Saito
進 斉藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP27087084A priority Critical patent/JPS61148419A/en
Publication of JPS61148419A publication Critical patent/JPS61148419A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/121Mechanical drive devices for polygonal mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

PURPOSE:To rotate a rotary polygon mirror accurately even in an extremely slow rotation area and to make a scan by rotating the rotating shaft on which the polygon mirror is fitted with an air jet, and braking the rotation with an eddy current from a good conductor disk and a fixed magnet. CONSTITUTION:The polygon mirror 21 is fitted on the rotating shaft 22. A rotary magnet 24 is fitted atop of the rotating shaft 22 and supported with the reaction force of the fixed magnet 25 to form a magnetic bearing. Further, a casing 28 is provided with a jet supply hole 35 to supply compressed air, which is injected from a jet injection hole 35 in the tangential direction of the rotating shaft 22 to rotate the rotating shaft 22. The compressed air is supplied to an air supply flow 32 to support the rotating shaft 22 by an air bearing. The rotating speed of the rotating shaft 22 is detected by a current controller 38 to control the rotating with the eddy current generated by the good conductor disk 29 fitted on the rotating shaft 22 and the electromagnet 30 of the casing 28. Thus, the rotating shaft is rotated with the air jet, so the rotating shaft rotates at a uniform speed to control the rotating speed with the eddy current, so that the shaft rotates with high precision even in the slow rotation range.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は多面鏡を回転することによって、光束を走査す
る走査回転多面鏡に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a scanning rotating polygon mirror that scans a light beam by rotating the polygon mirror.

【発明の背景〕[Background of the invention]

走査回転多面鏡は、レーザ光によって文字や記号を印字
するレーザ印刷機や、レーザ光によって画像を読み取る
レーザ読取り機において、レーザビームを走査する装置
で、これらの機器の心臓部ともいえる重要な装置である
The scanning rotating polygon mirror is a device that scans the laser beam in laser printers that print characters and symbols using laser light, and laser readers that read images using laser light, and is an important device that can be said to be the heart of these devices. It is.

従来、走査回転多面鏡は印字速度や読み取り速度を上げ
る観点から回転数をできるだけ上げるための工夫が多く
なされてきた0例えば、これに関連するものには、特公
昭57−49889等が挙げられれる。
Conventionally, many efforts have been made to increase the rotational speed of the scanning rotating polygon mirror as much as possible from the viewpoint of increasing the printing speed and reading speed. .

第1図は従来の高速で走査するための走査回転多面鏡で
ある。多面鏡1は回転軸2にナツト3によって取付けら
れている0回転軸2には電気モータのロータ4が固定さ
れ1回転磁石5が取付けられている0回転磁石5は軸方
向に着磁されていて、固定磁石6との反発力によって回
転軸2を支えるスラスト軸受の一方である。固定磁石6
はホルダ7に収まり、バネ8によって支えられる。バネ
8の他端はケーシング9に固定される。ケーシング9に
は電気モータのステータ10が固定され、ロータ4に回
転力が与えられる。これによって、回転軸2は回転され
る。ケーシング9からは複数のピボット11が半径方向
に突出て、その先端に動圧空気軸受のバッド12が付く
。回転軸2が10’rpm程度の高速回転になると、回
転軸2とバッド12の間に空気の動圧が発生し、この圧
力によって回転軸2は半径方向に保持される。
FIG. 1 shows a conventional scanning rotating polygon mirror for scanning at high speed. The polygon mirror 1 is attached to a rotation shaft 2 by a nut 3.A rotor 4 of an electric motor is fixed to the zero rotation shaft 2, and a one rotation magnet 5 is attached.The zero rotation magnet 5 is magnetized in the axial direction. This is one of the thrust bearings that supports the rotating shaft 2 by the repulsive force with the fixed magnet 6. Fixed magnet 6
fits into the holder 7 and is supported by a spring 8. The other end of the spring 8 is fixed to the casing 9. A stator 10 of an electric motor is fixed to the casing 9, and rotational force is applied to the rotor 4. As a result, the rotating shaft 2 is rotated. A plurality of pivots 11 protrude in the radial direction from the casing 9, and pads 12 of a hydrodynamic air bearing are attached to the tips of the pivots 11. When the rotating shaft 2 rotates at a high speed of about 10' rpm, dynamic air pressure is generated between the rotating shaft 2 and the pad 12, and this pressure holds the rotating shaft 2 in the radial direction.

回転軸の回転がI X 10’ないし5 X 10’r
pmという高速回転が要求されるときは、軸回りの慣性
モーメントが大きく作用して1回転端度はきわめて高く
保持される。
The rotation of the rotation axis is I x 10' to 5 x 10'r
When high-speed rotation of pm is required, the moment of inertia around the axis acts greatly and the degree of one rotation is maintained extremely high.

ところが、最近、走査回転多面鏡の用途の多様化に従い
、10”rpm程度の極低速回転で、しかもその回転変
動誤差は0.01 %以下という高回転精度が要求され
ている。しかし、このような低い回転数域での走査に対
しては、従来の高速回転型の走査回転多面鏡には以下に
示す欠点があり、まったく使用に耐えないのが現状であ
る。すなわち、(1)回転軸の駆動に用いる電気モータ
は磁界を回転することによって回転軸を回転させるが、
低速になるに従い、磁界の回転誤差が増加するとともに
1回転軸の慣性の効果が薄れるため、回転の一様性が急
激に低下する0例えば、103rpii程度の低速回転
では数%にもおよぶ回転誤差が生じ走査回転多面鏡とし
ての機能を失なう。
However, recently, as the applications of scanning rotating polygon mirrors have diversified, there has been a demand for extremely low rotation speed of about 10"rpm and high rotational accuracy with a rotational fluctuation error of 0.01% or less. For scanning at low rotational speeds, conventional high-speed rotating scanning polygon mirrors have the following drawbacks and are currently completely unusable: (1) The rotation axis The electric motor used to drive the motor rotates the rotating shaft by rotating the magnetic field.
As the speed decreases, the rotational error of the magnetic field increases and the effect of the inertia of the rotational axis weakens, so the rotational uniformity decreases rapidly. occurs and loses its function as a scanning rotating polygon mirror.

(2)低速回転になると、動圧空気軸受のバッドと回転
軸との間に動圧が発生しないので、回転軸を半径方向に
支えることができない。すなわち、軸受として作用しな
いので1回転軸は回転不能となる。
(2) At low speed rotation, no dynamic pressure is generated between the pad of the hydrodynamic air bearing and the rotating shaft, so the rotating shaft cannot be supported in the radial direction. That is, since it does not act as a bearing, the shaft cannot rotate once.

〔発明の目的〕[Purpose of the invention]

本発明の目的は低速回転域でも回転変動誤差のきわめて
少ない正確な走査ができる走査回転多面鏡を提供するこ
とにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a scanning rotating polygon mirror that can perform accurate scanning with extremely little rotational fluctuation error even in a low rotational speed range.

〔発明の概要〕[Summary of the invention]

この目的を達成するため、本発明の走査回転多面鏡では
、電気モータの回転磁界による回転駆動を止め、空気の
ジェットを用いて、連続した一様な回転力を回転軸に与
える。さらに1回転数を一定にするとともに、一様にす
るために、回転軸に良電導体の円板を取付け、これに電
磁石で磁界を与え、渦電流を発生させ、一様な制動力が
掛けられるようにした。電磁石への電流は回転軸の回転
を検知して調整されるので、回転体の回転速度の一定性
はきわめて高められる。
To achieve this objective, the scanning rotating polygon mirror of the present invention stops the rotational drive by the rotating magnetic field of the electric motor and uses an air jet to apply continuous and uniform rotational force to the rotating shaft. Furthermore, in order to keep the number of rotations constant and uniform, a disk of good conductor is attached to the rotating shaft, and a magnetic field is applied to it using an electromagnet, generating an eddy current and applying a uniform braking force. I made it possible to do so. Since the current to the electromagnet is adjusted by detecting the rotation of the rotating shaft, the rotational speed of the rotating body is highly consistent.

また、回転軸の半径方向の軸受である動圧空気軸受を止
め、回転軸の駆動に用いる空気ジェットの空気源を利用
して、静圧空気軸受で回転軸を半径方向に支持し、軸方
向の軸受としては磁気軸受を用いた。
In addition, the hydrodynamic air bearing, which is the radial bearing of the rotating shaft, is stopped, and the air source of the air jet used to drive the rotating shaft is used to support the rotating shaft in the radial direction with the hydrostatic air bearing. A magnetic bearing was used as the bearing.

この結果、10”rpm程度の低速回転でも回転軸を支
持できるとともに、空気の消費を半減することができる
As a result, the rotating shaft can be supported even when rotating at a low speed of about 10" rpm, and air consumption can be halved.

〔発明の実施例〕[Embodiments of the invention]

以下、本発明の一実施例を図によって詳細に説明する。 Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

第2図は本発明の走査回転多面鏡である。多面鏡21は
回転軸22にナツト23によって取付けられる6回転軸
22の先端には磁気軸受としての回転磁石24が付いて
いる。回転磁石24を反発力で支える固定磁石25はホ
ルダ26に収まり。
FIG. 2 shows a scanning rotating polygon mirror of the present invention. The polygon mirror 21 is attached to a rotating shaft 22 with a nut 23, and a rotating magnet 24 as a magnetic bearing is attached to the tip of the rotating shaft 22. A fixed magnet 25 that supports the rotating magnet 24 with repulsive force is housed in a holder 26.

バネ27によって支えられる。バネの他端はケーシング
28に固定される。ホルダ26とケーシング28の間に
は摩擦力や粘性力による減衰力が動くように、固体接触
するかあるいはグリース等が入れである。
It is supported by a spring 27. The other end of the spring is fixed to the casing 28. There is solid contact between the holder 26 and the casing 28, or a grease or the like is provided between the holder 26 and the casing 28 so that damping force due to frictional force or viscous force moves.

回転軸22には、導電性のよいアルミか銅を材料とする
円板29が固定される。ケーシング28には電磁石3o
が、その二つの磁極の間に円板29の一部がはさみ込ま
れる状態になるように取付けられる。
A disk 29 made of highly conductive aluminum or copper is fixed to the rotating shaft 22. The casing 28 has an electromagnet 3o
is attached so that a portion of the disc 29 is sandwiched between the two magnetic poles.

ケーシング28内には静圧空気軸受31が配置される。A hydrostatic air bearing 31 is arranged within the casing 28 .

後述するが1回転軸22を駆動するための空気源(図示
せず)から導かれた圧縮空気は空気供給孔32から軸受
内に入り、絞り33か°ら噴出し、回転軸22を半径方
向に支える。
As will be described later, compressed air led from an air source (not shown) for driving the rotating shaft 22 enters the bearing through the air supply hole 32, is ejected from the throttle 33, and rotates the rotating shaft 22 in the radial direction. Support.

ケーシング28内には、空気ジェット噴出装置34が固
定される。空気源から導かれた圧縮空気はジェット供給
孔35から供給されると1回転軸に対し、接線方向に向
くジェット噴出孔36から噴出し1回転軸にきわめて一
様な回転力を与える。
An air jet ejection device 34 is fixed within the casing 28 . When the compressed air led from the air source is supplied from the jet supply hole 35, it is ejected from the jet ejection hole 36 which is oriented tangentially to the rotation axis to apply extremely uniform rotational force to the rotation axis.

回転軸とケーシングの間には、回転検出器37があり、
回転軸の回転速度が正確に検出される。
There is a rotation detector 37 between the rotating shaft and the casing,
The rotational speed of the rotating shaft is accurately detected.

この回転検出器が示す回転速度の値を受は取った電流制
御装置38は、電磁石に適切な電流を供給して1回転軸
に制動を掛け、きわめて回転変動の少ない回転を保つこ
とができる。
The current control device 38 receives the value of the rotational speed indicated by the rotation detector and supplies an appropriate current to the electromagnet to apply a brake on the single rotation shaft, thereby maintaining rotation with extremely little rotational fluctuation.

第3図は本発明の走査回転多面鏡の回転力を発生する空
気ジェット噴出装置の軸方向断面図である。ジェット供
給孔35から矢印のように導入された空気はジェット噴
出孔36から回転軸に対し。
FIG. 3 is an axial cross-sectional view of an air jet blowing device for generating the rotational force of the scanning rotating polygon mirror of the present invention. Air introduced from the jet supply hole 35 in the direction of the arrow is directed from the jet ejection hole 36 toward the rotating shaft.

矢印のようにほぼ接線方向に噴出することを示している
。十分、整圧した空気を平滑な表面の回転軸に噴きつけ
るので1回転数にかかわらず、回転軸の駆動力は一様で
ある。もちろん、10”rp+a程度の低い回転数域で
も回転駆動力は一様である。
The arrow indicates that the water ejects almost tangentially. Since sufficiently regulated air is blown onto the rotating shaft, which has a smooth surface, the driving force of the rotating shaft is uniform regardless of the number of rotations. Of course, the rotational driving force is uniform even in a low rotational speed range of about 10''rp+a.

このように、空気ジェット噴出によって、従来電気モー
タでは決して得られないような速度変動誤差の少ない低
速回転が実現された。
In this way, the air jet blows out low-speed rotation with little speed fluctuation error, which could never be achieved with conventional electric motors.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明の走査回転多面鏡では、空気
ジェットで回転軸を一様な変動しない回転力で駆動し、
さらに、回転軸の回転を検出して渦電流で制動をかける
フィードバック回転制御を行なう為、きわめて低い回転
数域でも、回転変動のほとんどない高精度回転が可能と
なり、低速回転用の高性能走査回転鏡を提供できた。
As explained above, in the scanning rotating polygon mirror of the present invention, the rotating shaft is driven by an air jet with a uniform rotational force that does not fluctuate,
Furthermore, since feedback rotation control is performed that detects the rotation of the rotating shaft and applies braking using eddy current, it is possible to perform high-precision rotation with almost no rotation fluctuations even in the extremely low rotation speed range, making it possible to perform high-performance scanning rotation for low-speed rotation. I was able to provide a mirror.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の走査回転多面鏡の縦断面図、第2図は本
発明の一実施例になる走査回転多面鏡の縦断面図、第3
図は本発明の走査回転多面鏡の一部である空気ジェット
噴出装置の平断面図である。 21・・・多面鏡、22・・・回転軸、24・・・回転
磁石、25・・・固定磁石、29・・・円板、30・・
・電磁石、31・・・静圧空気軸受、34・・・空気ジ
ェット噴出装置、37・・・回転検出器、38・・・電
流制御装置。
FIG. 1 is a vertical sectional view of a conventional scanning rotating polygon mirror, FIG. 2 is a longitudinal sectional view of a scanning rotating polygon mirror according to an embodiment of the present invention, and FIG.
The figure is a plan sectional view of an air jet ejection device which is a part of the scanning rotating polygon mirror of the present invention. 21... Polygon mirror, 22... Rotating shaft, 24... Rotating magnet, 25... Fixed magnet, 29... Disc, 30...
- Electromagnet, 31... Static pressure air bearing, 34... Air jet ejection device, 37... Rotation detector, 38... Current control device.

Claims (1)

【特許請求の範囲】 1、多面鏡を取付けた回転軸を空気のジェットによつて
回転させることを特徴とする走査回転多面鏡。 2、上記走査回転多面鏡において、回転軸に取付けた良
電導性円板に、固定した電磁石から過電流を起し、回転
制動ができることを特徴とする請求の範囲第1項記載の
走査回転多面鏡。 3、上記走査回転多面鏡において、回転軸の回転を検出
し、過電流による制御力を制御できることを特徴とする
請求の範囲第2項記載の走査回転多面鏡。 4、上記走査回転多面鏡において、静圧空気軸受によつ
て回転軸を半径方向に支持することを特徴とする請求の
範囲第1乃至第3項記載の走査回転多面鏡。 5、上記走査回転多面鏡において、反発型磁気軸受によ
つて回転軸を軸方向に支持することを特徴とする請求の
範囲第1乃至第3項記載の走査回転多面鏡。
[Claims] 1. A scanning rotary polygon mirror characterized in that a rotating shaft on which the polygon mirror is attached is rotated by an air jet. 2. The scanning rotary polygon according to claim 1, wherein in the scanning rotary polygon mirror, rotation can be braked by generating an overcurrent from an electromagnet fixed to a well-conducting disc attached to the rotating shaft. mirror. 3. The scanning rotating polygon mirror according to claim 2, wherein the scanning rotating polygon mirror is capable of detecting the rotation of the rotating shaft and controlling the control force due to overcurrent. 4. The scanning rotating polygon mirror according to any one of claims 1 to 3, wherein the rotating shaft of the scanning rotating polygon mirror is supported in the radial direction by a static pressure air bearing. 5. The scanning rotating polygon mirror according to any one of claims 1 to 3, wherein the rotating shaft is supported in the axial direction by a repulsion type magnetic bearing.
JP27087084A 1984-12-24 1984-12-24 Scanning rotary polygon mirror Pending JPS61148419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27087084A JPS61148419A (en) 1984-12-24 1984-12-24 Scanning rotary polygon mirror

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27087084A JPS61148419A (en) 1984-12-24 1984-12-24 Scanning rotary polygon mirror

Publications (1)

Publication Number Publication Date
JPS61148419A true JPS61148419A (en) 1986-07-07

Family

ID=17492110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27087084A Pending JPS61148419A (en) 1984-12-24 1984-12-24 Scanning rotary polygon mirror

Country Status (1)

Country Link
JP (1) JPS61148419A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0423054A2 (en) * 1989-10-13 1991-04-17 Krause-Biagosch GmbH Method of producing printing plates by means of a laser beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0423054A2 (en) * 1989-10-13 1991-04-17 Krause-Biagosch GmbH Method of producing printing plates by means of a laser beam

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