JPS61144960U - - Google Patents

Info

Publication number
JPS61144960U
JPS61144960U JP2557185U JP2557185U JPS61144960U JP S61144960 U JPS61144960 U JP S61144960U JP 2557185 U JP2557185 U JP 2557185U JP 2557185 U JP2557185 U JP 2557185U JP S61144960 U JPS61144960 U JP S61144960U
Authority
JP
Japan
Prior art keywords
grinding
grinds
cup wheel
semiconductor wafers
wheel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2557185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2557185U priority Critical patent/JPS61144960U/ja
Publication of JPS61144960U publication Critical patent/JPS61144960U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
JP2557185U 1985-02-26 1985-02-26 Pending JPS61144960U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2557185U JPS61144960U (enrdf_load_stackoverflow) 1985-02-26 1985-02-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2557185U JPS61144960U (enrdf_load_stackoverflow) 1985-02-26 1985-02-26

Publications (1)

Publication Number Publication Date
JPS61144960U true JPS61144960U (enrdf_load_stackoverflow) 1986-09-06

Family

ID=30520760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2557185U Pending JPS61144960U (enrdf_load_stackoverflow) 1985-02-26 1985-02-26

Country Status (1)

Country Link
JP (1) JPS61144960U (enrdf_load_stackoverflow)

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