JPS61144959U - - Google Patents
Info
- Publication number
- JPS61144959U JPS61144959U JP2557085U JP2557085U JPS61144959U JP S61144959 U JPS61144959 U JP S61144959U JP 2557085 U JP2557085 U JP 2557085U JP 2557085 U JP2557085 U JP 2557085U JP S61144959 U JPS61144959 U JP S61144959U
- Authority
- JP
- Japan
- Prior art keywords
- grinds
- wheel
- semiconductor wafers
- diamond grinding
- cup
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910003460 diamond Inorganic materials 0.000 claims description 5
- 239000010432 diamond Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000001154 acute effect Effects 0.000 claims 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2557085U JPS61144959U (enExample) | 1985-02-26 | 1985-02-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2557085U JPS61144959U (enExample) | 1985-02-26 | 1985-02-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61144959U true JPS61144959U (enExample) | 1986-09-06 |
Family
ID=30520758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2557085U Pending JPS61144959U (enExample) | 1985-02-26 | 1985-02-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61144959U (enExample) |
-
1985
- 1985-02-26 JP JP2557085U patent/JPS61144959U/ja active Pending