JPS61144635U - - Google Patents

Info

Publication number
JPS61144635U
JPS61144635U JP1985027232U JP2723285U JPS61144635U JP S61144635 U JPS61144635 U JP S61144635U JP 1985027232 U JP1985027232 U JP 1985027232U JP 2723285 U JP2723285 U JP 2723285U JP S61144635 U JPS61144635 U JP S61144635U
Authority
JP
Japan
Prior art keywords
cup
workpiece
processing
semiconductor manufacturing
sloped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985027232U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985027232U priority Critical patent/JPS61144635U/ja
Publication of JPS61144635U publication Critical patent/JPS61144635U/ja
Pending legal-status Critical Current

Links

JP1985027232U 1985-02-28 1985-02-28 Pending JPS61144635U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985027232U JPS61144635U (enrdf_load_stackoverflow) 1985-02-28 1985-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985027232U JPS61144635U (enrdf_load_stackoverflow) 1985-02-28 1985-02-28

Publications (1)

Publication Number Publication Date
JPS61144635U true JPS61144635U (enrdf_load_stackoverflow) 1986-09-06

Family

ID=30523984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985027232U Pending JPS61144635U (enrdf_load_stackoverflow) 1985-02-28 1985-02-28

Country Status (1)

Country Link
JP (1) JPS61144635U (enrdf_load_stackoverflow)

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