JPS61143040U - - Google Patents
Info
- Publication number
- JPS61143040U JPS61143040U JP2571385U JP2571385U JPS61143040U JP S61143040 U JPS61143040 U JP S61143040U JP 2571385 U JP2571385 U JP 2571385U JP 2571385 U JP2571385 U JP 2571385U JP S61143040 U JPS61143040 U JP S61143040U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- fixing base
- pressure
- introduction hole
- pressure introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2571385U JPS61143040U (cs) | 1985-02-25 | 1985-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2571385U JPS61143040U (cs) | 1985-02-25 | 1985-02-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61143040U true JPS61143040U (cs) | 1986-09-04 |
Family
ID=30521033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2571385U Pending JPS61143040U (cs) | 1985-02-25 | 1985-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61143040U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014097585A1 (ja) * | 2012-12-18 | 2014-06-26 | 株式会社デンソー | 圧力センサとその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944918A (cs) * | 1972-09-04 | 1974-04-27 | ||
| JPS5851243B2 (ja) * | 1979-07-24 | 1983-11-15 | 住友電気工業株式会社 | 光フアイバケ−ブルの製造方法 |
-
1985
- 1985-02-25 JP JP2571385U patent/JPS61143040U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944918A (cs) * | 1972-09-04 | 1974-04-27 | ||
| JPS5851243B2 (ja) * | 1979-07-24 | 1983-11-15 | 住友電気工業株式会社 | 光フアイバケ−ブルの製造方法 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014097585A1 (ja) * | 2012-12-18 | 2014-06-26 | 株式会社デンソー | 圧力センサとその製造方法 |
| JP2014119391A (ja) * | 2012-12-18 | 2014-06-30 | Denso Corp | 圧力センサ |
| US9588000B2 (en) | 2012-12-18 | 2017-03-07 | Denso Corporation | Pressure sensor and method for manufacturing same |
| DE112013006062B4 (de) * | 2012-12-18 | 2020-09-03 | Denso Corporation | Drucksensor und Verfahren zu dessen Fertigung |