JPS61142375A - Vacuum pump - Google Patents
Vacuum pumpInfo
- Publication number
- JPS61142375A JPS61142375A JP26421684A JP26421684A JPS61142375A JP S61142375 A JPS61142375 A JP S61142375A JP 26421684 A JP26421684 A JP 26421684A JP 26421684 A JP26421684 A JP 26421684A JP S61142375 A JPS61142375 A JP S61142375A
- Authority
- JP
- Japan
- Prior art keywords
- oil
- suction port
- oil suction
- exhaust port
- dust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ダストを多く排気する真空ポンプに関し、特
に（至）やドライエツチャー等の半導体製造装置に使用
する真空ポンプに関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a vacuum pump for evacuating a large amount of dust, and particularly to a vacuum pump used in semiconductor manufacturing equipment such as a dry etcher or the like.
従来、この種の真空ポンプは、ポンプ本体をカバーする
ケーシングを持っている。ケーシングはオイル留めを兼
ねており、このオイルはポンプの潤滑油と真空シールと
して使われている。オイルはポンプ下部にあるオイル吸
引口からポンプ内部に入り、ポンプ内部を通って排気口
から排出されるＯ
〔発明が解決しようとする問題点〕
上述した従来の真空ポンプは排気口から排出されたオイ
ルがそのままオイル吸入口に流入する構造となっている
ので、ダストを多く排気した場合ダストが混じったオイ
ルをそのまま吸入してしまい、結果としてオイル吸入口
をつまらせ短時間で真空ポンプの運転を不能としてしま
う欠点があったＯ
本発明は前記問題点を解消した装置を提供するものであ
る。Conventionally, this type of vacuum pump has a casing that covers the pump body. The casing also serves as an oil retainer, and this oil is used as a lubricant for the pump and as a vacuum seal. Oil enters the inside of the pump from the oil suction port at the bottom of the pump, passes through the inside of the pump, and is discharged from the exhaust port. The structure is such that oil flows directly into the oil inlet, so if a lot of dust is exhausted, the oil mixed with dust will be sucked in as it is, which will clog the oil inlet and stop the vacuum pump from operating in a short time. The present invention provides an apparatus that solves the above-mentioned problems.
本発明はケーシング内を仕切ｐ板にて排気口側とオイル
吸引口側とに隔離し、排気口側からオイルを吸入し、そ
のオイルを濾過した後オイル吸入口側に送るオイルフィ
ルターユニットを有することを特徴とする真空ポンプで
ある。The present invention has an oil filter unit that separates the inside of the casing into an exhaust port side and an oil suction port side by a partition plate, sucks oil from the exhaust port side, filters the oil, and sends it to the oil suction port side. This vacuum pump is characterized by:
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の実施例を示す断面図である。FIG. 1 is a sectional view showing an embodiment of the present invention.
ケーシング１内に仕切り板２を設置してその内部を排気
口３側とオイル吸入口４側とに完全に区画し、排気口３
から出たダストが混じったオイル５がオイル吸入口４側
に直接流入しないようにし、仕切り板２をはさんで両室
間をオイルフィルターユニット６にて接続する。実施例
において、排気口３側のオイル５はオイルフィルターユ
ニット６を通って濾過されオイル中に含まれたダストは
フィルターに捕捉され、清浄なオイルのみがオイル吸引
口４側に送られてこのオイルが真空ポンプの潤滑オイル
又は真空シールとして管路へ送り込まれる。A partition plate 2 is installed inside the casing 1 to completely divide the interior into an exhaust port 3 side and an oil suction port 4 side.
The oil 5 mixed with dust discharged from the chamber is prevented from directly flowing into the oil suction port 4 side, and the two chambers are connected by an oil filter unit 6 with a partition plate 2 in between. In the embodiment, the oil 5 on the side of the exhaust port 3 is filtered through the oil filter unit 6, the dust contained in the oil is captured by the filter, and only clean oil is sent to the side of the oil suction port 4. is fed into the pipeline as lubricating oil for the vacuum pump or as a vacuum seal.
以上説明したように本発明によれば、オイル吸入口側に
は循環オイル中に含まれるダストが流入しないため、オ
イル吸入口を詰まらせることがなく、したがって真空ポ
ンプの運転を安定して長時間維持することができる効果
を有するものである。As explained above, according to the present invention, the dust contained in the circulating oil does not flow into the oil suction port side, so the oil suction port is not clogged, and therefore the vacuum pump can operate stably for a long time. It has an effect that can be maintained.
第１図は本発明の一実施例を示す断面図である。
ｌ・・・ケーシング、２・・−・仕切り板、３・・・排
気口、４・・・オイル吸引口、５・・・オイル、６・・
・オイルフィルターユニットFIG. 1 is a sectional view showing one embodiment of the present invention. l...Casing, 2...-Partition plate, 3...Exhaust port, 4...Oil suction port, 5...Oil, 6...
・Oil filter unit
Claims (1)
ケーシング内を仕切り板により排気口側と、オイル吸入
口側とに分離し、排気口側からオイル吸入口側にオイル
を送るオイルフィルターユニットを有することを特徴と
する真空ポンプ。(1) In vacuum pumps used in semiconductor manufacturing equipment,
A vacuum pump characterized in that the inside of a casing is separated into an exhaust port side and an oil suction port side by a partition plate, and has an oil filter unit that sends oil from the exhaust port side to the oil suction port side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26421684A JPS61142375A (en) | 1984-12-14 | 1984-12-14 | Vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26421684A JPS61142375A (en) | 1984-12-14 | 1984-12-14 | Vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61142375A true JPS61142375A (en) | 1986-06-30 |
Family
ID=17400103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26421684A Pending JPS61142375A (en) | 1984-12-14 | 1984-12-14 | Vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61142375A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007149629A (en) * | 2005-10-26 | 2007-06-14 | Matsushita Electric Works Ltd | Quick-connection terminal device and wiring fixture |
-
1984
- 1984-12-14 JP JP26421684A patent/JPS61142375A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007149629A (en) * | 2005-10-26 | 2007-06-14 | Matsushita Electric Works Ltd | Quick-connection terminal device and wiring fixture |
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