JPS61140711A - Multi-holes burner with heat exchanger tube - Google Patents

Multi-holes burner with heat exchanger tube

Info

Publication number
JPS61140711A
JPS61140711A JP26068884A JP26068884A JPS61140711A JP S61140711 A JPS61140711 A JP S61140711A JP 26068884 A JP26068884 A JP 26068884A JP 26068884 A JP26068884 A JP 26068884A JP S61140711 A JPS61140711 A JP S61140711A
Authority
JP
Japan
Prior art keywords
mixed gas
distribution pipe
secondary air
tube
heat exchanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26068884A
Other languages
Japanese (ja)
Other versions
JPS6252205B2 (en
Inventor
Tomizo Kagomoto
籠本 富造
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kitazawa Sangyo Co Ltd
Original Assignee
Kitazawa Sangyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kitazawa Sangyo Co Ltd filed Critical Kitazawa Sangyo Co Ltd
Priority to JP26068884A priority Critical patent/JPS61140711A/en
Publication of JPS61140711A publication Critical patent/JPS61140711A/en
Publication of JPS6252205B2 publication Critical patent/JPS6252205B2/ja
Granted legal-status Critical Current

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  • Gas Burners (AREA)

Abstract

PURPOSE:To spout mixed gas uniformly in the circumferential and axial directions from distribution pipe of mixed gas by installing distribution pipes of sec. air and mixed gas coaxially in such away that many spouting nozzles of mixed gas are protruded on distribution pipe at regular intervals cir cumferentially and axially. CONSTITUTION:Outside the distribution pipe of mixed gas installed at the center of heat exchanger tube 1 with a exhaust nozzle 2 at its end, sec air pipe is installed coaxially with a specified space. On the outside surface of distribution pipe 5, many spouting nozzles 6 of mixed gas are protruded at regular intervals circumferentially and axially. As mixed gas spouted from nozzles 6 is burnt via divergent nozzles 7, the gas expands and the gap between nozzle 6 and divergent nozzle 7 is in negative pressure by its energy, and therefore, sec. air is drawn in and supplied to flame. As a result, high temperature flame is formed and all parts of the heat exchanger tube 1 are uniformly heated up.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は伝熱管を介して熱を外部に伝える伝熱管付マル
チホールバーナに関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a multi-hole burner with heat transfer tubes that transmits heat to the outside via heat transfer tubes.

(従来技術) 均一加熱伝熱管を付けた加熱手段としては、従来より電
気式シーズヒータが知られているが、シーズヒータは4
0%前後のエネルギー転換率しかなく、またヒータ内の
絶縁の問題により500℃前後の表面温度が実用範囲と
されている。
(Prior art) Electric sheathed heaters have been known as heating means equipped with uniform heating heat transfer tubes, but sheathed heaters have four
The energy conversion rate is only around 0%, and due to insulation problems within the heater, a surface temperature of around 500° C. is considered to be a practical range.

これを補うものとして、直接燃焼ガスを伝熱管の中を強
制的に通過させて高温伝熱を行うラジアントチューブの
ように、管入口にバーナを設け、このバーナの火焔を他
の動力により管内に流通させて伝熱管を加熱し、外部に
熱を伝える形式のものもある。
To compensate for this, a burner is installed at the inlet of the tube, such as a radiant tube, which transfers high-temperature heat by forcing direct combustion gas through the heat transfer tube. There is also a type that heats the heat transfer tube by circulating it and transfers the heat to the outside.

(発明が解決しようとする問題点) しかしながらこのような形式のものの場合にはバーナが
存在する伝熱管入口と、その反対側の排気口との間の温
度差が大きくなり、伝熱管の全長に亘る均熱加熱ができ
ない欠点がある。従って、極部加熱が発生し、被加熱物
に恩影豐を与えることとなっている。また、従来の天ぷ
ら等の揚げ物油槽の中に横向きに伝熱管を通して加熱を
行う浸管式のバーナでは、火焔がガス浮力により旨く燃
えないので、伝熱管の上半部しか伝熱部として作用せず
、下半部はあまり伝熱の役にたたない欠点があった。ま
た、従来形式のものでは燃焼ガス(CO2)が伝熱管の
出口に向うに従って増加してゆき、出口側にゆく程Go
(不完全燃焼ガス)を含む形となり、燃焼環境が悪化し
、火焔の形式も困難になる欠点があった。これはブンゼ
ン式バーナ及びその類似のものは、燃焼完結に必要な二
次空気を伝熱管中の空気(02)でまかなっているため
である。従って、伝熱管直径を必要以上太くして過剰空
気を吸い込めるようにしなければならず、その結果、伝
熱管内の温度が低くなり、放射伝熱量がTK4で決まる
から相当大きな伝熱面が必要となる欠点があった。
(Problem to be solved by the invention) However, in the case of this type of tube, the temperature difference between the inlet of the heat transfer tube where the burner is located and the exhaust port on the opposite side becomes large, and the temperature difference increases over the entire length of the heat transfer tube. It has the disadvantage that it cannot be uniformly heated over a long period of time. Therefore, extreme heating occurs, which affects the object to be heated. In addition, with conventional immersion tube burners that heat foods such as tempura by passing a heat transfer tube horizontally into an oil tank, the flame does not burn well due to the buoyancy of the gas, so only the upper half of the heat transfer tube acts as a heat transfer section. First, the lower half had the disadvantage that it was not very useful for heat transfer. In addition, in the conventional type, the combustion gas (CO2) increases toward the outlet of the heat exchanger tube, and the more it goes toward the outlet, the more
(incompletely combusted gas), which worsens the combustion environment and makes it difficult to form a flame. This is because Bunsen type burners and similar burners use the air (02) in the heat transfer tubes to provide the secondary air necessary for completing combustion. Therefore, it is necessary to make the diameter of the heat exchanger tube larger than necessary so that excess air can be sucked in. As a result, the temperature inside the heat exchanger tube becomes low, and since the amount of radiant heat transfer is determined by TK4, a considerably large heat transfer surface is required. There was a drawback.

本発明の目的は、伝熱管の長手方向にもまた周方向にも
均一に加熱することができる伝熱管付マルチホールバー
ナを提供するにある。
An object of the present invention is to provide a multi-hole burner with a heat exchanger tube that can uniformly heat the heat exchanger tube in both the longitudinal direction and the circumferential direction.

(問題点を解決するための手段) 上記の目的を達成する本発明の構成を、実施例に対応す
る第1図乃至第3図を参照して説明すると、本発明は先
端に排気口2を有する伝熱管1の中に2次空気分配!i
4と混合ガス分配管5とが、前記混合ガス分配管5が中
心に存在するようにして同心状に所定の間隔を隔てて配
設されている。
(Means for Solving the Problems) The structure of the present invention that achieves the above object will be explained with reference to FIGS. 1 to 3 corresponding to embodiments. The present invention has an exhaust port 2 at the tip. Secondary air distribution inside the heat exchanger tube 1 with! i
4 and a mixed gas distribution pipe 5 are arranged concentrically at a predetermined interval so that the mixed gas distribution pipe 5 is located at the center.

混合ガス分配管5の外周には周方向及び長手方向に所定
の間隔で多数の混合ガス噴出ノズル6が突設されている
A large number of mixed gas jetting nozzles 6 are protruded from the outer periphery of the mixed gas distribution pipe 5 at predetermined intervals in the circumferential and longitudinal directions.

前記2次空気分配管4の外周には前記各ノズル6に対応
して2次空気吸込末広がり筒7が内外を連通させるよう
にしてそれぞれ突設されている。
On the outer periphery of the secondary air distribution pipe 4, flared secondary air suction tubes 7 are protruded in correspondence with the respective nozzles 6 so as to communicate between the inside and the outside.

前記2次空気分配管4及び前記混合ガス分配管5の各先
端は閉塞されている。前記2次空気分配管4の基端には
2次空気吸込用ベンチュリー管9が連設されている。前
記混合ガス分配管5の基端には混合ガス形成吸込用ベン
チュリー管11が前記2次空気吸込用ベンチュリー管9
に対して同心状に連設されている。前記混合ガス形成吸
込用ベンチュリー管11の入口には燃料ガス噴射ノズル
12と1次空気取入部13とが設けられている。前記2
次空気吸込用ベンチュリー管9の入口には2次空気取入
部16が設けられている。
Each tip of the secondary air distribution pipe 4 and the mixed gas distribution pipe 5 is closed. A secondary air suction venturi pipe 9 is connected to the base end of the secondary air distribution pipe 4. At the base end of the mixed gas distribution pipe 5, a mixed gas forming suction venturi pipe 11 is connected to the secondary air suction venturi pipe 9.
They are arranged concentrically with each other. A fuel gas injection nozzle 12 and a primary air intake part 13 are provided at the inlet of the venturi pipe 11 for forming and suctioning the mixed gas. Said 2
A secondary air intake section 16 is provided at the entrance of the venturi tube 9 for secondary air intake.

(作用) このように混合ガス分配管5に混合ガス噴出ノズル6を
突設し、これに対応して2次空気分配管4に2次空気吸
込末広がり筒7を設けると、ノズル6より噴出された混
合ガスが該末広がり筒7で燃焼することにより約6〜8
倍に膨張され、そのエネルギーによりノズル6と末広が
り筒7の隙間が負圧になり2次空気が吸込まれて火焔に
供給され、^温の火焔が形成される。このような作用が
各ノズル6の先端で同様に行われるので、伝熱管1の各
部は一様に均熱加熱される。
(Function) If the mixed gas jetting nozzle 6 is provided protrudingly in the mixed gas distribution pipe 5 in this way, and the secondary air suction tube 7 is correspondingly provided in the secondary air distribution pipe 4, the air is jetted from the nozzle 6. The mixed gas burns in the flared cylinder 7, resulting in about 6 to 8
It is expanded twice, and the energy creates a negative pressure in the gap between the nozzle 6 and the tube 7 that widens toward the end, and secondary air is sucked in and supplied to the flame, forming a hot flame. Since such an action is performed in the same way at the tip of each nozzle 6, each part of the heat exchanger tube 1 is uniformly heated.

(実施例) 以下本発明の実施例を第1図乃至第3図を参照して詳細
に説明する。図示のように本実施例の伝熱管付マルチホ
ールバーナは、丸形、四角形、多角形等よりなる伝熱t
R1を備え、その先端には排気口2が設けられている。
(Example) Examples of the present invention will be described in detail below with reference to FIGS. 1 to 3. As shown in the figure, the multi-hole burner with heat transfer tubes of this embodiment has heat transfer tubes of round, square, polygonal, etc.
R1, and an exhaust port 2 is provided at the tip thereof.

伝熱管1には排気口2の手前に放射状の余熱回収部3が
設けられている。
The heat exchanger tube 1 is provided with a radial residual heat recovery section 3 in front of the exhaust port 2.

伝熱管1内には、2次空気分配管4と混合ガス分配管5
とがZ混合ガス分配!25が中心に存在するようにして
同心状に所定の間隔をへだでて配設されている。混合ガ
ス分配管5の外周には、周方向及び長手方向に所定の間
隔で多数の先細り形の混合ガス噴出ノズル6が突設され
ている。2次空気分配管4の外周には各ノズル6に対応
して2次空気吸込末広がり筒7が内外を連通させるよう
にしてそれぞれ突設されている。これら2次空気吸込末
広がり筒7の途中には火移り孔8がそれぞれ設けられて
いる。2次空気分配管4及び混合ガス分配管5の各先端
は閉塞されている。2次空気分配管4の基端には2次空
気吸込用ベンチュリー管9が連設され、該管9の基端は
伝熱管1の基端の端板10を買通して外部に導出されて
いる。混合ガス分配管5の基端には混合ガス形成吸込用
ベンチュリー管11が2次空気吸込用ベンチュリー管9
に対して同心状に連設され、同様に伝熱管1の外部に導
出されている。混合ガス形成吸込用ベンチュリー管11
の入口には、中央に燃料ガス噴射ノズル12が設けられ
、その外周に1次空気取入部13が設けれている。1次
空気取入部13には、1次空気ダンパ固定部14と1次
空気ダンパ回転部15とが設けられている。2次空気吸
込用ベンチュリー管9の入口には2次空気取入部16が
設けられている。2次空気取入部16には、2次空気ダ
ンパ固定部17と2次空気ダンパ回転部18とが設けら
れている。燃料ガス噴射ノズル12にはガス流量調節部
19が設けられ、また燃料供給管20が接続されている
。1次、2次空気ダンパ回転部15.18とガス流量調
節部19とは、空燃比率調節リンク機構21で連動調整
されるようになっている。
Inside the heat exchanger tube 1, there are a secondary air distribution pipe 4 and a mixed gas distribution pipe 5.
Toga Z mixed gas distribution! 25 is located in the center, and are arranged concentrically at a predetermined interval. A large number of tapered mixed gas ejection nozzles 6 are protruded from the outer periphery of the mixed gas distribution pipe 5 at predetermined intervals in the circumferential and longitudinal directions. On the outer periphery of the secondary air distribution pipe 4, a secondary air suction tube 7 is protruded in correspondence with each nozzle 6 so as to communicate between the inside and the outside. Fire transfer holes 8 are provided in the middle of these secondary air suction tubes 7 that expand toward the end. The ends of the secondary air distribution pipe 4 and the mixed gas distribution pipe 5 are closed. A secondary air suction venturi tube 9 is connected to the base end of the secondary air distribution pipe 4, and the base end of the tube 9 is led out through the end plate 10 at the base end of the heat transfer tube 1. There is. At the base end of the mixed gas distribution pipe 5, there is a venturi pipe 11 for forming and suctioning a mixed gas, and a venturi pipe 9 for suctioning secondary air.
The heat exchanger tube 1 is connected concentrically to the heat exchanger tube 1, and is similarly led out to the outside of the heat exchanger tube 1. Venturi tube 11 for mixed gas formation and suction
A fuel gas injection nozzle 12 is provided at the center of the inlet, and a primary air intake portion 13 is provided at the outer periphery of the fuel gas injection nozzle 12. The primary air intake section 13 is provided with a primary air damper fixing section 14 and a primary air damper rotating section 15 . A secondary air intake section 16 is provided at the entrance of the venturi tube 9 for secondary air intake. The secondary air intake section 16 is provided with a secondary air damper fixing section 17 and a secondary air damper rotating section 18 . The fuel gas injection nozzle 12 is provided with a gas flow rate adjustment section 19, and is connected to a fuel supply pipe 20. The primary and secondary air damper rotation parts 15.18 and the gas flow rate adjustment part 19 are interlocked and adjusted by an air-fuel ratio adjustment link mechanism 21.

このようなマルチホールバーナにおいては、ノズル12
から噴出された燃料ガスは1次空気取入部13から取入
れられた1次空気と混合ガス形成吸込用ベンチュリー管
11で混合され、混合ガスとなって吸い込まれ、混合ガ
ス分配管5で各ノズル6に分配され各ノズル6から2次
空気吸込末広がり筒7内に噴出される。
In such a multi-hole burner, the nozzle 12
The fuel gas ejected from the primary air intake section 13 is mixed with the primary air taken in from the primary air intake section 13 in the mixed gas forming suction venturi pipe 11, and is sucked in as a mixed gas. The secondary air is distributed from each nozzle 6 into the secondary air suction tube 7 .

かかる状態で、1〜数個の2次空気吸込末広がり筒7に
点火すると、残りの総ての2次空気吸込末広がり筒7に
火移り孔8を経て点火される。これら末広がり筒7内で
の混合ガスの燃焼により該117の壁が加熱され、ノズ
ル6の方向に1次火焔22が形成される。ノズル6と2
次空気吸込末広がりI!7とを組合わせて使用すると、
ノズル6から噴出された混合ガスが燃焼されることによ
り約6〜8倍に気体が末広がり筒7の先端で膨張され、
そのエネルギーによってノズル6と末広がり筒7の間隙
が負圧になって2次空気が吸込まれて1次火焔22に供
給され、高温の2次火焔23が形成される。各末広がり
筒7でこのような混合ガスの噴出及び2次空気の供給作
用が行われるので、伝熱管1の各部を均熱加熱すること
ができる。末広がり筒7は、この火焔22.23により
保熱されると共に2次空気により適度に冷却され、保焔
の役目をする。
In this state, when one to several secondary air suction flared tubes 7 are ignited, all the remaining secondary air suction tubes 7 are ignited through the spark transfer holes 8. The combustion of the mixed gas in these diverging cylinders 7 heats the wall of said 117, and a primary flame 22 is formed in the direction of the nozzle 6. Nozzles 6 and 2
Next air intake spreads I! When used in combination with 7,
When the mixed gas ejected from the nozzle 6 is combusted, the gas spreads out to about 6 to 8 times and expands at the tip of the tube 7.
The energy creates a negative pressure in the gap between the nozzle 6 and the tube 7 that widens toward the end, and secondary air is sucked in and supplied to the primary flame 22, forming a high-temperature secondary flame 23. Since the ejecting of the mixed gas and the supply of secondary air are performed in each of the tubes 7 that widen toward the end, each part of the heat exchanger tube 1 can be uniformly heated. The flared cylinder 7 is heat-retained by the flames 22 and 23 and is appropriately cooled by the secondary air, thus serving as a flame insulator.

なお、2次空気は1次空気100に対し20〜60の割
合で供給されるようになっている。
Note that the secondary air is supplied at a ratio of 20 to 60 parts per 100 parts of the primary air.

(発明の効果) 以上説明したように本発明の伝熱管付マルチホールバー
ナでは、伝熱管内に2次空気分配管と混合ガス分配管と
を同心配置し、中心の混合ガス分配管の外周には周方向
及び長手方向に所定の間隔で多数の混合ガス噴出ノズル
を突設したので、混合ガス分配管の周方向及び長手方向
の各位置からほぼ一様に混合ガスを噴出させることがで
きる。
(Effects of the Invention) As explained above, in the multi-hole burner with heat transfer tubes of the present invention, the secondary air distribution pipe and the mixed gas distribution pipe are arranged concentrically within the heat transfer tube, and the outer periphery of the central mixed gas distribution pipe is Since a large number of mixed gas ejection nozzles are protruded at predetermined intervals in the circumferential direction and longitudinal direction, the mixed gas can be ejected almost uniformly from each position in the circumferential direction and longitudinal direction of the mixed gas distribution pipe.

また、これらノズルに対応して2次空気分配管の外周に
は2次空気吸込末広がり筒が内外を連通させるように突
設されているので、各ノズルから噴出された混合ガスが
対応する末広がり筒内で燃焼される際に大きく膨張され
、そのエネルギーによリノズルと末広がり筒の間隙が負
圧になり、2次空気が効果的に吸込まれて1次火焔に供
給されるようになり、それぞれ高温の2次火焔を得るこ
とができる。従って、本発明によれば、横向きで使用さ
れても下側となる部分でもほぼ一様な燃焼が得られ、伝
熱管の均熱加熱を得ることができる。
In addition, in correspondence with these nozzles, secondary air suction tubes protruding from the outer periphery of the secondary air distribution pipe are provided so as to communicate between the inside and outside, so that the mixed gas ejected from each nozzle is transferred to the corresponding flared tube. The energy expands greatly when it burns inside the flame, and the energy creates a negative pressure in the gap between the re-nozzle and the flared cylinder, allowing the secondary air to be effectively sucked in and supplied to the primary flame, increasing the temperature of each flame. You can obtain a secondary flame of. Therefore, according to the present invention, even if the heat exchanger tube is used horizontally, almost uniform combustion can be obtained even in the lower portion, and uniform heating of the heat exchanger tube can be achieved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明に係るバーナの一実施例の縦断面図、第
2図は第1図の■−■轢断面図、第3図は第1図のI−
1線断面図である。 1・・・・・・伝熱管、2・・・・・・排気口、4・・
・・・・2次空気分配管、5・・・・・・混合ガス分配
管、6・・・・・・混合ガス噴射ノズル、7・・・・・
・2次空気吸込末広がり筒、8・・・・・・火移り孔、
9・・・・・・2次空気吸込用ベンチュリー管、11・
・・・・・混合ガス形成吸込用ベンチュリー管、12・
・・・・・燃料ガス噴射ノズル、13・・・・・・1次
空気取入部、16・・・・・・2次空気取入部。 イtプご)営
FIG. 1 is a longitudinal cross-sectional view of an embodiment of the burner according to the present invention, FIG. 2 is a cross-sectional view taken along ■--■ in FIG. 1, and FIG.
It is a 1-line sectional view. 1... Heat exchanger tube, 2... Exhaust port, 4...
...Secondary air distribution pipe, 5...Mixed gas distribution pipe, 6...Mixed gas injection nozzle, 7...
・Secondary air suction tube expanding at the end, 8... fire transfer hole,
9... Venturi tube for secondary air suction, 11.
...Venturi tube for forming and suctioning mixed gas, 12.
... Fuel gas injection nozzle, 13 ... Primary air intake section, 16 ... Secondary air intake section. Ipgo) Management

Claims (1)

【特許請求の範囲】[Claims] 先端に排気口を有する伝熱管の中に2次空気分配管と混
合ガス分配管とが、前記混合ガス分配管が中心に存在す
るようにして同心状に所定の間隔をへだてて配設され、
前記混合ガス分配管の外周には周方向及び長手方向に所
定の間隔で多数の混合ガス噴出ノズルが突設され、前記
2次空気分配管の外周には前記各ノズルに対応して2次
空気吸込末広がり筒が内外を連通させるようにしてそれ
ぞれ突設され、前記2次空気分配管及び前記混合ガス分
配管の各先端は閉塞され、前記2次空気分配管の基端に
は2次空気吸込用ベンチュリー管が連設され、前記混合
ガス分配管の基端には混合ガス形成吸込用ベンチュリー
管が前記2次空気吸込用ベンチュリー管に対して同心状
に連設され、前記混合ガス形成吸込用ベンチュリー管の
入口には燃料ガス噴射ノズルと1次空気取入部とが設け
られ、前記2次空気吸込用ベンチュリー管の入口には2
次空気取入部が設けられていることを特徴とする伝熱管
付マルチホールバーナ。
A secondary air distribution pipe and a mixed gas distribution pipe are arranged concentrically at a predetermined distance apart from each other at a predetermined interval, with the mixed gas distribution pipe located in the center, in a heat transfer tube having an exhaust port at the tip,
A large number of mixed gas jetting nozzles are protruded from the outer periphery of the mixed gas distribution pipe at predetermined intervals in the circumferential and longitudinal directions, and secondary air is ejected from the outer periphery of the secondary air distribution pipe corresponding to each nozzle. A suction tube that expands at the end is protruded so as to communicate between the inside and the outside, each tip of the secondary air distribution pipe and the mixed gas distribution pipe is closed, and a secondary air suction tube is provided at the base end of the secondary air distribution pipe. A Venturi tube for suction for forming a mixed gas is connected to the base end of the mixed gas distribution pipe, and a Venturi tube for suction for forming a mixed gas is connected concentrically to the Venturi tube for suctioning the secondary air. A fuel gas injection nozzle and a primary air intake section are provided at the inlet of the Venturi tube, and a two
A multi-hole burner with a heat transfer tube, characterized by being provided with a secondary air intake section.
JP26068884A 1984-12-12 1984-12-12 Multi-holes burner with heat exchanger tube Granted JPS61140711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26068884A JPS61140711A (en) 1984-12-12 1984-12-12 Multi-holes burner with heat exchanger tube

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26068884A JPS61140711A (en) 1984-12-12 1984-12-12 Multi-holes burner with heat exchanger tube

Publications (2)

Publication Number Publication Date
JPS61140711A true JPS61140711A (en) 1986-06-27
JPS6252205B2 JPS6252205B2 (en) 1987-11-04

Family

ID=17351390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26068884A Granted JPS61140711A (en) 1984-12-12 1984-12-12 Multi-holes burner with heat exchanger tube

Country Status (1)

Country Link
JP (1) JPS61140711A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614724U (en) * 1992-07-21 1994-02-25 パーカー熱処理工業株式会社 Single end burner
JP2013185791A (en) * 2012-03-09 2013-09-19 Osaka Gas Co Ltd Radiant tube type heating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3801300B2 (en) * 1997-03-21 2006-07-26 セイコーエプソン株式会社 Manufacturing method of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0614724U (en) * 1992-07-21 1994-02-25 パーカー熱処理工業株式会社 Single end burner
JP2013185791A (en) * 2012-03-09 2013-09-19 Osaka Gas Co Ltd Radiant tube type heating device

Also Published As

Publication number Publication date
JPS6252205B2 (en) 1987-11-04

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