JPS6113933U - Wafer underwater transport device - Google Patents

Wafer underwater transport device

Info

Publication number
JPS6113933U
JPS6113933U JP9815984U JP9815984U JPS6113933U JP S6113933 U JPS6113933 U JP S6113933U JP 9815984 U JP9815984 U JP 9815984U JP 9815984 U JP9815984 U JP 9815984U JP S6113933 U JPS6113933 U JP S6113933U
Authority
JP
Japan
Prior art keywords
wafer
transport device
underwater transport
underwater
center line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9815984U
Other languages
Japanese (ja)
Other versions
JPH069511Y2 (en
Inventor
康行 尾身
Original Assignee
不二越機械工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 不二越機械工業株式会社 filed Critical 不二越機械工業株式会社
Priority to JP1984098159U priority Critical patent/JPH069511Y2/en
Publication of JPS6113933U publication Critical patent/JPS6113933U/en
Application granted granted Critical
Publication of JPH069511Y2 publication Critical patent/JPH069511Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は禾考案のウエハー搬送装置の平面図を、第２図
は第１図のＡ−Ａ’線を通る縦断面図を、第３図は本考
案の搬送板の拡大平面図の一部を、第４図は本考案のノ
ズルの縦断面図を、第５図は本考案の搬送板ベースの平
面図を示す。 １・・・前工桿出口、２・・・ウエハー、３・・・搬送
板、４・・・後工程入口、５・・・ノズル、６・・・水
槽、７・・・槽送板ベース、８・・・給水管、９，１０
，１１・・・開口、１２・・・配水溝。Fig. 1 is a plan view of the wafer transfer device devised by He, Fig. 2 is a longitudinal sectional view taken along the line A-A' in Fig. 1, and Fig. 3 is an enlarged plan view of the transfer plate of the present invention. FIG. 4 is a longitudinal sectional view of the nozzle of the present invention, and FIG. 5 is a plan view of the conveying plate base of the present invention. 1... Front process rod outlet, 2... Wafer, 3... Transfer plate, 4... Post process inlet, 5... Nozzle, 6... Water tank, 7... Tank feeding plate base , 8... Water supply pipe, 9, 10
, 11... Opening, 12... Water distribution groove.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] その表面の中心線の両側に所定の間隔で少くとも２列に
並び、該中心線に向って１５゜±５°、該表面に対し３
０゜±５゜傾斜して開口し水を噴射する多数のノズルを
そなえた搬送板を特徴とするウエハーの水中搬送装置。arranged in at least two rows at predetermined intervals on either side of the center line of the surface, 15°±5° toward the center line and 33° relative to the surface.
An underwater wafer transport device characterized by a transport plate equipped with a large number of nozzles that open at an angle of 0°±5° and spray water.
JP1984098159U 1984-06-29 1984-06-29 Submersible wafer carrier Expired - Lifetime JPH069511Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984098159U JPH069511Y2 (en) 1984-06-29 1984-06-29 Submersible wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984098159U JPH069511Y2 (en) 1984-06-29 1984-06-29 Submersible wafer carrier

Publications (2)

Publication Number Publication Date
JPS6113933U true JPS6113933U (en) 1986-01-27
JPH069511Y2 JPH069511Y2 (en) 1994-03-09

Family

ID=30657708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984098159U Expired - Lifetime JPH069511Y2 (en) 1984-06-29 1984-06-29 Submersible wafer carrier

Country Status (1)

Country Link
JP (1) JPH069511Y2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113246A (en) * 1980-12-19 1982-07-14 Ibm Air film conveyor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113246A (en) * 1980-12-19 1982-07-14 Ibm Air film conveyor

Also Published As

Publication number Publication date
JPH069511Y2 (en) 1994-03-09

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