JPS61138929U - - Google Patents
Info
- Publication number
- JPS61138929U JPS61138929U JP2214185U JP2214185U JPS61138929U JP S61138929 U JPS61138929 U JP S61138929U JP 2214185 U JP2214185 U JP 2214185U JP 2214185 U JP2214185 U JP 2214185U JP S61138929 U JPS61138929 U JP S61138929U
- Authority
- JP
- Japan
- Prior art keywords
- ventilation
- output
- emitting
- detecting
- integrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims 3
- 238000005070 sampling Methods 0.000 claims 3
- 238000011109 contamination Methods 0.000 claims 1
- 230000010354 integration Effects 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 230000004044 response Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2214185U JPS61138929U (enExample) | 1985-02-19 | 1985-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2214185U JPS61138929U (enExample) | 1985-02-19 | 1985-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61138929U true JPS61138929U (enExample) | 1986-08-28 |
Family
ID=30514173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2214185U Pending JPS61138929U (enExample) | 1985-02-19 | 1985-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61138929U (enExample) |
-
1985
- 1985-02-19 JP JP2214185U patent/JPS61138929U/ja active Pending