JPS61138879U - - Google Patents

Info

Publication number
JPS61138879U
JPS61138879U JP2294185U JP2294185U JPS61138879U JP S61138879 U JPS61138879 U JP S61138879U JP 2294185 U JP2294185 U JP 2294185U JP 2294185 U JP2294185 U JP 2294185U JP S61138879 U JPS61138879 U JP S61138879U
Authority
JP
Japan
Prior art keywords
vacuum pump
stage
clutch
stage side
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2294185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH022948Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2294185U priority Critical patent/JPH022948Y2/ja
Priority to US06/724,284 priority patent/US4662826A/en
Priority to DE19853514317 priority patent/DE3514317A1/de
Publication of JPS61138879U publication Critical patent/JPS61138879U/ja
Application granted granted Critical
Publication of JPH022948Y2 publication Critical patent/JPH022948Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2294185U 1984-04-20 1985-02-20 Expired JPH022948Y2 (https=)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2294185U JPH022948Y2 (https=) 1985-02-20 1985-02-20
US06/724,284 US4662826A (en) 1984-04-20 1985-04-17 Vacuum pump system including serially connected rotary and reciprocating vacuum pumps
DE19853514317 DE3514317A1 (de) 1984-04-20 1985-04-19 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2294185U JPH022948Y2 (https=) 1985-02-20 1985-02-20

Publications (2)

Publication Number Publication Date
JPS61138879U true JPS61138879U (https=) 1986-08-28
JPH022948Y2 JPH022948Y2 (https=) 1990-01-24

Family

ID=30515713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2294185U Expired JPH022948Y2 (https=) 1984-04-20 1985-02-20

Country Status (1)

Country Link
JP (1) JPH022948Y2 (https=)

Also Published As

Publication number Publication date
JPH022948Y2 (https=) 1990-01-24

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