JPS61138879U - - Google Patents

Info

Publication number
JPS61138879U
JPS61138879U JP2294185U JP2294185U JPS61138879U JP S61138879 U JPS61138879 U JP S61138879U JP 2294185 U JP2294185 U JP 2294185U JP 2294185 U JP2294185 U JP 2294185U JP S61138879 U JPS61138879 U JP S61138879U
Authority
JP
Japan
Prior art keywords
vacuum pump
stage
clutch
stage side
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2294185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH022948Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2294185U priority Critical patent/JPH022948Y2/ja
Priority to US06/724,284 priority patent/US4662826A/en
Priority to DE19853514317 priority patent/DE3514317A1/de
Publication of JPS61138879U publication Critical patent/JPS61138879U/ja
Application granted granted Critical
Publication of JPH022948Y2 publication Critical patent/JPH022948Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2294185U 1984-04-20 1985-02-20 Expired JPH022948Y2 (OSRAM)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2294185U JPH022948Y2 (OSRAM) 1985-02-20 1985-02-20
US06/724,284 US4662826A (en) 1984-04-20 1985-04-17 Vacuum pump system including serially connected rotary and reciprocating vacuum pumps
DE19853514317 DE3514317A1 (de) 1984-04-20 1985-04-19 Vakuumpumpe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2294185U JPH022948Y2 (OSRAM) 1985-02-20 1985-02-20

Publications (2)

Publication Number Publication Date
JPS61138879U true JPS61138879U (OSRAM) 1986-08-28
JPH022948Y2 JPH022948Y2 (OSRAM) 1990-01-24

Family

ID=30515713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2294185U Expired JPH022948Y2 (OSRAM) 1984-04-20 1985-02-20

Country Status (1)

Country Link
JP (1) JPH022948Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH022948Y2 (OSRAM) 1990-01-24

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