JPS61138488U - - Google Patents

Info

Publication number
JPS61138488U
JPS61138488U JP1985019437U JP1943785U JPS61138488U JP S61138488 U JPS61138488 U JP S61138488U JP 1985019437 U JP1985019437 U JP 1985019437U JP 1943785 U JP1943785 U JP 1943785U JP S61138488 U JPS61138488 U JP S61138488U
Authority
JP
Japan
Prior art keywords
mask pattern
pattern plates
same plane
plates
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985019437U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0320057Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985019437U priority Critical patent/JPH0320057Y2/ja
Publication of JPS61138488U publication Critical patent/JPS61138488U/ja
Application granted granted Critical
Publication of JPH0320057Y2 publication Critical patent/JPH0320057Y2/ja
Expired legal-status Critical Current

Links

JP1985019437U 1985-02-13 1985-02-13 Expired JPH0320057Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985019437U JPH0320057Y2 (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985019437U JPH0320057Y2 (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Publications (2)

Publication Number Publication Date
JPS61138488U true JPS61138488U (enrdf_load_stackoverflow) 1986-08-28
JPH0320057Y2 JPH0320057Y2 (enrdf_load_stackoverflow) 1991-04-30

Family

ID=30509021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985019437U Expired JPH0320057Y2 (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Country Status (1)

Country Link
JP (1) JPH0320057Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206591A (en) * 1981-05-13 1982-12-17 Datogurafu Peteirigangusu Gmbh Device for forming mark onto surface of body by laser beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57206591A (en) * 1981-05-13 1982-12-17 Datogurafu Peteirigangusu Gmbh Device for forming mark onto surface of body by laser beam

Also Published As

Publication number Publication date
JPH0320057Y2 (enrdf_load_stackoverflow) 1991-04-30

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