JPS61138263U - - Google Patents
Info
- Publication number
- JPS61138263U JPS61138263U JP1985022979U JP2297985U JPS61138263U JP S61138263 U JPS61138263 U JP S61138263U JP 1985022979 U JP1985022979 U JP 1985022979U JP 2297985 U JP2297985 U JP 2297985U JP S61138263 U JPS61138263 U JP S61138263U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film electrode
- common
- common thin
- piezoelectric material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 239000013013 elastic material Substances 0.000 claims 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022979U JPS61138263U (fr) | 1985-02-19 | 1985-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985022979U JPS61138263U (fr) | 1985-02-19 | 1985-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61138263U true JPS61138263U (fr) | 1986-08-27 |
Family
ID=30515786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985022979U Pending JPS61138263U (fr) | 1985-02-19 | 1985-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61138263U (fr) |
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1985
- 1985-02-19 JP JP1985022979U patent/JPS61138263U/ja active Pending