JPS61137949U - - Google Patents

Info

Publication number
JPS61137949U
JPS61137949U JP1985020606U JP2060685U JPS61137949U JP S61137949 U JPS61137949 U JP S61137949U JP 1985020606 U JP1985020606 U JP 1985020606U JP 2060685 U JP2060685 U JP 2060685U JP S61137949 U JPS61137949 U JP S61137949U
Authority
JP
Japan
Prior art keywords
exposure device
reticle
gas
dust
transparent cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1985020606U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985020606U priority Critical patent/JPS61137949U/ja
Publication of JPS61137949U publication Critical patent/JPS61137949U/ja
Pending legal-status Critical Current

Links

JP1985020606U 1985-02-18 1985-02-18 Pending JPS61137949U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985020606U JPS61137949U (enrdf_load_stackoverflow) 1985-02-18 1985-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985020606U JPS61137949U (enrdf_load_stackoverflow) 1985-02-18 1985-02-18

Publications (1)

Publication Number Publication Date
JPS61137949U true JPS61137949U (enrdf_load_stackoverflow) 1986-08-27

Family

ID=30511254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985020606U Pending JPS61137949U (enrdf_load_stackoverflow) 1985-02-18 1985-02-18

Country Status (1)

Country Link
JP (1) JPS61137949U (enrdf_load_stackoverflow)

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