JPS61137671U - - Google Patents

Info

Publication number
JPS61137671U
JPS61137671U JP1983785U JP1983785U JPS61137671U JP S61137671 U JPS61137671 U JP S61137671U JP 1983785 U JP1983785 U JP 1983785U JP 1983785 U JP1983785 U JP 1983785U JP S61137671 U JPS61137671 U JP S61137671U
Authority
JP
Japan
Prior art keywords
wafer boat
heating element
bell gear
nozzle
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1983785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983785U priority Critical patent/JPS61137671U/ja
Publication of JPS61137671U publication Critical patent/JPS61137671U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1983785U 1985-02-14 1985-02-14 Pending JPS61137671U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983785U JPS61137671U (enrdf_load_html_response) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983785U JPS61137671U (enrdf_load_html_response) 1985-02-14 1985-02-14

Publications (1)

Publication Number Publication Date
JPS61137671U true JPS61137671U (enrdf_load_html_response) 1986-08-27

Family

ID=30509777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983785U Pending JPS61137671U (enrdf_load_html_response) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPS61137671U (enrdf_load_html_response)

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