JPS61137501U - - Google Patents

Info

Publication number
JPS61137501U
JPS61137501U JP2176985U JP2176985U JPS61137501U JP S61137501 U JPS61137501 U JP S61137501U JP 2176985 U JP2176985 U JP 2176985U JP 2176985 U JP2176985 U JP 2176985U JP S61137501 U JPS61137501 U JP S61137501U
Authority
JP
Japan
Prior art keywords
section
arm section
drives
storage device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2176985U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2176985U priority Critical patent/JPS61137501U/ja
Publication of JPS61137501U publication Critical patent/JPS61137501U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す斜視図、第２
図は従来の基板収納装置の一例を示す斜視図であ
る。 １……基板、２……アーム部、３……水平駆動
部、４……垂直駆動部、５……収納カセツト部、
６……先行センサ部、Ａ……収納基板間１ピツチ
距離。 Fig. 1 is a perspective view showing one embodiment of the present invention;
The figure is a perspective view showing an example of a conventional substrate storage device. 1... Board, 2... Arm part, 3... Horizontal drive part, 4... Vertical drive part, 5... Storage cassette part,
6...Advanced sensor section, A...1 pitch distance between storage boards.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を保持するアーム部と、前記アーム部を水
平方向に駆動する水平駆動部と、前記アーム部を
垂直方向に駆動する垂直駆動部と、前記アーム部
に固定された先行センサ部と、前記基板を収納す
る収納カセツト部とを含むことを特徴とする先行
センサ付基板収納装置。 an arm section that holds a substrate, a horizontal drive section that drives the arm section in a horizontal direction, a vertical drive section that drives the arm section in a vertical direction, a preceding sensor section fixed to the arm section, and the substrate. 1. A board storage device with a preceding sensor, comprising a storage cassette section for storing a board storage device.
JP2176985U 1985-02-18 1985-02-18 Pending JPS61137501U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2176985U JPS61137501U (en) 1985-02-18 1985-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2176985U JPS61137501U (en) 1985-02-18 1985-02-18

Publications (1)

Publication Number Publication Date
JPS61137501U true JPS61137501U (en) 1986-08-26

Family

ID=30513465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2176985U Pending JPS61137501U (en) 1985-02-18 1985-02-18

Country Status (1)

Country Link
JP (1) JPS61137501U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008213918A (en) * 2007-03-07 2008-09-18 Nippon Electric Glass Co Ltd Glass substrate packing device and glass substrate packing method
CN111377075A (en) * 2018-12-27 2020-07-07 上海仪电显示材料有限公司 Boxing device and working method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008213918A (en) * 2007-03-07 2008-09-18 Nippon Electric Glass Co Ltd Glass substrate packing device and glass substrate packing method
CN111377075A (en) * 2018-12-27 2020-07-07 上海仪电显示材料有限公司 Boxing device and working method thereof

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