JPS61137490U - - Google Patents

Info

Publication number
JPS61137490U
JPS61137490U JP2133685U JP2133685U JPS61137490U JP S61137490 U JPS61137490 U JP S61137490U JP 2133685 U JP2133685 U JP 2133685U JP 2133685 U JP2133685 U JP 2133685U JP S61137490 U JPS61137490 U JP S61137490U
Authority
JP
Japan
Prior art keywords
cam
movable member
arm
arms
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2133685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2133685U priority Critical patent/JPS61137490U/ja
Publication of JPS61137490U publication Critical patent/JPS61137490U/ja
Pending legal-status Critical Current

Links

JP2133685U 1985-02-19 1985-02-19 Pending JPS61137490U (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2133685U JPS61137490U (es) 1985-02-19 1985-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2133685U JPS61137490U (es) 1985-02-19 1985-02-19

Publications (1)

Publication Number Publication Date
JPS61137490U true JPS61137490U (es) 1986-08-26

Family

ID=30512639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2133685U Pending JPS61137490U (es) 1985-02-19 1985-02-19

Country Status (1)

Country Link
JP (1) JPS61137490U (es)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01192130A (ja) * 1988-01-27 1989-08-02 Tokyo Electron Ltd 検査装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916978B1 (es) * 1969-06-30 1974-04-26
JPS5495452A (en) * 1978-01-06 1979-07-27 Hitachi Ltd Holder
JPS5642892B2 (es) * 1977-06-17 1981-10-07

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916978B1 (es) * 1969-06-30 1974-04-26
JPS5642892B2 (es) * 1977-06-17 1981-10-07
JPS5495452A (en) * 1978-01-06 1979-07-27 Hitachi Ltd Holder

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01192130A (ja) * 1988-01-27 1989-08-02 Tokyo Electron Ltd 検査装置

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