JPS61136535U - - Google Patents
Info
- Publication number
- JPS61136535U JPS61136535U JP1923485U JP1923485U JPS61136535U JP S61136535 U JPS61136535 U JP S61136535U JP 1923485 U JP1923485 U JP 1923485U JP 1923485 U JP1923485 U JP 1923485U JP S61136535 U JPS61136535 U JP S61136535U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- rotating shaft
- moving
- moving shaft
- rotational motion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1923485U JPH0410687Y2 (https=) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1923485U JPH0410687Y2 (https=) | 1985-02-14 | 1985-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61136535U true JPS61136535U (https=) | 1986-08-25 |
| JPH0410687Y2 JPH0410687Y2 (https=) | 1992-03-17 |
Family
ID=30508620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1923485U Expired JPH0410687Y2 (https=) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0410687Y2 (https=) |
-
1985
- 1985-02-14 JP JP1923485U patent/JPH0410687Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410687Y2 (https=) | 1992-03-17 |