JPS61136535U - - Google Patents

Info

Publication number
JPS61136535U
JPS61136535U JP1923485U JP1923485U JPS61136535U JP S61136535 U JPS61136535 U JP S61136535U JP 1923485 U JP1923485 U JP 1923485U JP 1923485 U JP1923485 U JP 1923485U JP S61136535 U JPS61136535 U JP S61136535U
Authority
JP
Japan
Prior art keywords
shaft
rotating shaft
moving
moving shaft
rotational motion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1923485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410687Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1923485U priority Critical patent/JPH0410687Y2/ja
Publication of JPS61136535U publication Critical patent/JPS61136535U/ja
Application granted granted Critical
Publication of JPH0410687Y2 publication Critical patent/JPH0410687Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1923485U 1985-02-14 1985-02-14 Expired JPH0410687Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1923485U JPH0410687Y2 (enExample) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1923485U JPH0410687Y2 (enExample) 1985-02-14 1985-02-14

Publications (2)

Publication Number Publication Date
JPS61136535U true JPS61136535U (enExample) 1986-08-25
JPH0410687Y2 JPH0410687Y2 (enExample) 1992-03-17

Family

ID=30508620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1923485U Expired JPH0410687Y2 (enExample) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPH0410687Y2 (enExample)

Also Published As

Publication number Publication date
JPH0410687Y2 (enExample) 1992-03-17

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