JPS61136314A - Surface acoustic wave signal processor - Google Patents
Surface acoustic wave signal processorInfo
- Publication number
- JPS61136314A JPS61136314A JP25741984A JP25741984A JPS61136314A JP S61136314 A JPS61136314 A JP S61136314A JP 25741984 A JP25741984 A JP 25741984A JP 25741984 A JP25741984 A JP 25741984A JP S61136314 A JPS61136314 A JP S61136314A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- receiving
- transmitting
- surface acoustic
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6406—Filters characterised by a particular frequency characteristic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
- H03H9/72—Networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明は1弾性表面波を利用したタップ付遅延線を用
いた信号エンコード、及びデコード装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a signal encoding and decoding device using a tapped delay line using a single surface acoustic wave.
従来1弾性表面波タップ付遅延線を用いた信号エンコー
ド、デコード装置は、送信側電極と受信側電極が平行に
1対1で対応している。そして。In a conventional signal encoding/decoding device using a single surface acoustic wave tapped delay line, transmitting side electrodes and receiving side electrodes are parallel and correspond to each other on a one-to-one basis. and.
エンコードまたはデコードできる信号のノくターンは、
受信側電極の電極形状によって固定である。The number of signals that can be encoded or decoded is
It is fixed depending on the electrode shape of the receiving side electrode.
したがりて、数種類の信号パターンのエンコード。Therefore, the encoding of several types of signal patterns.
デコードを行ないたい場合は、その個数個分の送信電極
及び受信電極をペアで形成しなければならない。If decoding is desired, the number of transmitting electrodes and receiving electrodes must be formed in pairs.
この発明は、上述した従来装置の欠点を改良したもので
、送信電極を円形状で一方向性のもの1つとし、入力信
号から送信電極へのファンアウトを1つとし、入力信号
レベルの増大を避け、また送受電極をコンパクトに配置
することのできる信号処理装置を提供することを目的と
する。This invention improves the above-mentioned drawbacks of the conventional device.The present invention uses one circular and unidirectional transmitting electrode, and has one fan-out from the input signal to the transmitting electrode, thereby increasing the input signal level. It is an object of the present invention to provide a signal processing device in which transmission and reception electrodes can be arranged in a compact manner.
圧電性を有するウェハー上に、すだれ状電極(インター
ディジタルトランスデエーサー)を金属蒸着、エツチン
グなどにより形成する。または非圧電性ウェハー上にす
だれ状taを同様に形成し、その上に圧電性薄膜を成長
させることにより、得た送受電極の送信電極に信号電圧
を印加するとここで弾性表面波が発生し、受信電極の所
へ伝搬し、受信電極で弾性表面波が電気信号に変換され
る。Interdigital transducers (interdigital transducers) are formed on a piezoelectric wafer by metal vapor deposition, etching, or the like. Alternatively, by similarly forming an interdigital ta on a non-piezoelectric wafer and growing a piezoelectric thin film on it, surface acoustic waves are generated when a signal voltage is applied to the transmitting electrode of the obtained transmitting and receiving electrode. The surface acoustic wave propagates to the receiving electrode, where the surface acoustic wave is converted into an electrical signal.
信号のエンコード、またはデコードを行なう場合受信側
電極形状によって、応答する信号パターンは決まってし
まうので、複数個の信号パター/を扱う場合にはそれぞ
れに応答する形状の受信電極を設けなければならない。When encoding or decoding a signal, the response signal pattern is determined by the shape of the receiver electrode, so when handling multiple signal patterns, it is necessary to provide a receiver electrode with a shape that responds to each.
この場合送信電極を円形状、一方向性として中央に置き
、その周辺に受信電極を複数個配置することにより、送
受信電極の集積度を増すことができる。In this case, by placing a circular, unidirectional transmitting electrode in the center and arranging a plurality of receiving electrodes around it, the degree of integration of the transmitting and receiving electrodes can be increased.
この発明の実施例を第1図に示す。第1図では、シリコ
ン基板(11)上に、送受信用のアルミ電ff1(21
゜22、・・・、28)があり、その上にZnO圧電性
薄膜03が形成されている。ここで、送信用1を極Qj
は、120°位相型一方向性電極であり、1200位相
器0υにより入力信号を図1のように印加すると、弾性
表面波は、放射状に伝搬し、送信電極c!Dの内側には
伝わらない。22,23,24,25,26゜27.2
8は、それぞれ受信電極で、それぞれ異なる電極形状を
している。32は、入力信号周辺回路であり、33は出
力信号周辺回路である。An embodiment of this invention is shown in FIG. In Fig. 1, an aluminum conductor ff1 (21) for transmitting and receiving is placed on a silicon substrate (11).
22, . . , 28), and a ZnO piezoelectric thin film 03 is formed thereon. Here, 1 for transmission is pole Qj
is a 120° phase type unidirectional electrode, and when an input signal is applied as shown in Fig. 1 using a 1200 phase shifter 0υ, the surface acoustic wave propagates radially and reaches the transmitting electrode c! It is not transmitted to the inside of D. 22, 23, 24, 25, 26°27.2
8 are receiving electrodes, each having a different electrode shape. 32 is an input signal peripheral circuit, and 33 is an output signal peripheral circuit.
第2図に、7ビツトパーカーコードのデコード原理の1
例を示す。送信電極が11のような(a)受信電極が1
2のような(b)形状をしている場合に。Figure 2 shows one of the principles of decoding a 7-bit Parker code.
Give an example. (a) The receiving electrode is 1 such that the transmitting electrode is 11.
When it has the shape (b) like 2.
送信電極に(C)に示すような信号が入った場合に受信
電極では(d)に示すような信号が得られる。When a signal as shown in (C) enters the transmitting electrode, a signal as shown in (d) is obtained at the receiving electrode.
また、第3図の電極形状において、送信電極Q11(a
)に(C)に示すような信号を入力すると受信電極器に
(b)、第2図(C)に示すようなエンコードされた信
号が得られる。Furthermore, in the electrode shape shown in FIG. 3, the transmitting electrode Q11 (a
) When a signal as shown in (C) is inputted to the receiving electrode, an encoded signal as shown in (b) and FIG. 2 (C) is obtained at the receiving electrode.
第4図に示す実施例は、送信電極QDとして、90’位
相型一方向性電極を用い、受信電極(22゜23)は2
重に送信電極をとりまいている。内側の受信電極(ハ)
と外側の受信電極(至)との間には図に示すようなくぼ
み(至)を設けることにより、放射状に広がる弾性表面
波を平行な波面をもった波にしている。In the embodiment shown in FIG. 4, a 90' phase type unidirectional electrode is used as the transmitting electrode QD, and the receiving electrode (22°23) is 2
It heavily surrounds the transmitting electrodes. Inner receiving electrode (c)
By providing a depression (to) as shown in the figure between the front and outer receiving electrodes (to), the radially spreading surface acoustic waves are made into waves with parallel wavefronts.
また、外側の受信電極は弾性表面波が電極に伝わるまで
の途中の散乱や減衰を考慮して内側の電極より幅が広く
なっている。図の13は弾性表面波の吸収材である。Further, the width of the outer receiving electrode is wider than that of the inner electrode in consideration of scattering and attenuation during the transmission of surface acoustic waves to the electrode. 13 in the figure is a surface acoustic wave absorbing material.
このような構造にすることによって、受信電極の数を2
倍にすることができる。送信電極から内側の受信電極ま
での距離と外側の受信電極までの距離の差が大きく、受
信信号の遅延差が問題になる場合は、内側の受信電極か
ら出力信号回路の途中に遅延素子を挿入すればよい。With this structure, the number of receiving electrodes can be reduced to 2.
Can be doubled. If there is a large difference in the distance between the transmitting electrode and the inner receiving electrode and the distance between the outer receiving electrode and the delay difference in the received signal becomes a problem, insert a delay element between the inner receiving electrode and the output signal circuit. do it.
ン゛
代理人 弁理士 則 近 憲 佑(他1名)第 1
図
第 2 図Agent: Patent Attorney Noriyuki Chika (and 1 other person) No. 1
Figure 2
Claims (1)
とし、その周辺に複数個の受信側電極を配置したことを
特徴とする弾性表面波信号処理装置。A surface acoustic wave signal processing device characterized in that a transmitter electrode for surface acoustic wave excitation is a circular, unidirectional electrode, and a plurality of receiver electrodes are arranged around the transmitter electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25741984A JPS61136314A (en) | 1984-12-07 | 1984-12-07 | Surface acoustic wave signal processor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25741984A JPS61136314A (en) | 1984-12-07 | 1984-12-07 | Surface acoustic wave signal processor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61136314A true JPS61136314A (en) | 1986-06-24 |
Family
ID=17306105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25741984A Pending JPS61136314A (en) | 1984-12-07 | 1984-12-07 | Surface acoustic wave signal processor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61136314A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2363011A (en) * | 2000-05-31 | 2001-12-05 | Acoustical Tech Sg Pte Ltd | Two-dimensional propagation in a surface acoustic wave device |
US7323802B2 (en) | 2000-05-31 | 2008-01-29 | Acoustical Technologies Singapore Pte. Ltd. | Surface acoustic wave device |
-
1984
- 1984-12-07 JP JP25741984A patent/JPS61136314A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2363011A (en) * | 2000-05-31 | 2001-12-05 | Acoustical Tech Sg Pte Ltd | Two-dimensional propagation in a surface acoustic wave device |
WO2001093421A1 (en) * | 2000-05-31 | 2001-12-06 | Nanyang Technological University | Surface acoustic wave device |
GB2363011B (en) * | 2000-05-31 | 2002-04-17 | Acoustical Tech Sg Pte Ltd | Surface acoustic wave device |
US7323802B2 (en) | 2000-05-31 | 2008-01-29 | Acoustical Technologies Singapore Pte. Ltd. | Surface acoustic wave device |
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