JPS61135656U - - Google Patents
Info
- Publication number
- JPS61135656U JPS61135656U JP1703685U JP1703685U JPS61135656U JP S61135656 U JPS61135656 U JP S61135656U JP 1703685 U JP1703685 U JP 1703685U JP 1703685 U JP1703685 U JP 1703685U JP S61135656 U JPS61135656 U JP S61135656U
- Authority
- JP
- Japan
- Prior art keywords
- polysilicon film
- doped polysilicon
- heat resistance
- coated
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 7
- 229920005591 polysilicon Polymers 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- 238000005299 abrasion Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Landscapes
- Electronic Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1703685U JPS61135656U (enrdf_load_stackoverflow) | 1985-02-12 | 1985-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1703685U JPS61135656U (enrdf_load_stackoverflow) | 1985-02-12 | 1985-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61135656U true JPS61135656U (enrdf_load_stackoverflow) | 1986-08-23 |
Family
ID=30504368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1703685U Pending JPS61135656U (enrdf_load_stackoverflow) | 1985-02-12 | 1985-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61135656U (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56121780A (en) * | 1980-03-03 | 1981-09-24 | Tdk Corp | Thermal head |
-
1985
- 1985-02-12 JP JP1703685U patent/JPS61135656U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56121780A (en) * | 1980-03-03 | 1981-09-24 | Tdk Corp | Thermal head |