JPS61135500U - - Google Patents

Info

Publication number
JPS61135500U
JPS61135500U JP1783085U JP1783085U JPS61135500U JP S61135500 U JPS61135500 U JP S61135500U JP 1783085 U JP1783085 U JP 1783085U JP 1783085 U JP1783085 U JP 1783085U JP S61135500 U JPS61135500 U JP S61135500U
Authority
JP
Japan
Prior art keywords
waveguide
plasma discharge
microwave plasma
discharge device
radio wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1783085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1783085U priority Critical patent/JPS61135500U/ja
Publication of JPS61135500U publication Critical patent/JPS61135500U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP1783085U 1985-02-13 1985-02-13 Pending JPS61135500U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1783085U JPS61135500U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1783085U JPS61135500U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Publications (1)

Publication Number Publication Date
JPS61135500U true JPS61135500U (enrdf_load_stackoverflow) 1986-08-23

Family

ID=30505902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1783085U Pending JPS61135500U (enrdf_load_stackoverflow) 1985-02-13 1985-02-13

Country Status (1)

Country Link
JP (1) JPS61135500U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007326063A (ja) * 2006-06-09 2007-12-20 Hitachi Plant Technologies Ltd マイクロ化学反応装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007326063A (ja) * 2006-06-09 2007-12-20 Hitachi Plant Technologies Ltd マイクロ化学反応装置

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