JPS61135037U - - Google Patents

Info

Publication number
JPS61135037U
JPS61135037U JP1837285U JP1837285U JPS61135037U JP S61135037 U JPS61135037 U JP S61135037U JP 1837285 U JP1837285 U JP 1837285U JP 1837285 U JP1837285 U JP 1837285U JP S61135037 U JPS61135037 U JP S61135037U
Authority
JP
Japan
Prior art keywords
flywheel
driven
voltage
ceramic element
torque fluctuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1837285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH035701Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1837285U priority Critical patent/JPH035701Y2/ja
Publication of JPS61135037U publication Critical patent/JPS61135037U/ja
Application granted granted Critical
Publication of JPH035701Y2 publication Critical patent/JPH035701Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP1837285U 1985-02-14 1985-02-14 Expired JPH035701Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1837285U JPH035701Y2 (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1837285U JPH035701Y2 (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Publications (2)

Publication Number Publication Date
JPS61135037U true JPS61135037U (enrdf_load_stackoverflow) 1986-08-22
JPH035701Y2 JPH035701Y2 (enrdf_load_stackoverflow) 1991-02-14

Family

ID=30506948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1837285U Expired JPH035701Y2 (enrdf_load_stackoverflow) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPH035701Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7629590B2 (en) 2003-12-12 2009-12-08 Semequip, Inc. Method and apparatus for extending equipment uptime in ion implantation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7629590B2 (en) 2003-12-12 2009-12-08 Semequip, Inc. Method and apparatus for extending equipment uptime in ion implantation

Also Published As

Publication number Publication date
JPH035701Y2 (enrdf_load_stackoverflow) 1991-02-14

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