JPS61135037U - - Google Patents
Info
- Publication number
- JPS61135037U JPS61135037U JP1837285U JP1837285U JPS61135037U JP S61135037 U JPS61135037 U JP S61135037U JP 1837285 U JP1837285 U JP 1837285U JP 1837285 U JP1837285 U JP 1837285U JP S61135037 U JPS61135037 U JP S61135037U
- Authority
- JP
- Japan
- Prior art keywords
- flywheel
- driven
- voltage
- ceramic element
- torque fluctuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1837285U JPH035701Y2 (OSRAM) | 1985-02-14 | 1985-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1837285U JPH035701Y2 (OSRAM) | 1985-02-14 | 1985-02-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61135037U true JPS61135037U (OSRAM) | 1986-08-22 |
| JPH035701Y2 JPH035701Y2 (OSRAM) | 1991-02-14 |
Family
ID=30506948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1837285U Expired JPH035701Y2 (OSRAM) | 1985-02-14 | 1985-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH035701Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7629590B2 (en) | 2003-12-12 | 2009-12-08 | Semequip, Inc. | Method and apparatus for extending equipment uptime in ion implantation |
-
1985
- 1985-02-14 JP JP1837285U patent/JPH035701Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7629590B2 (en) | 2003-12-12 | 2009-12-08 | Semequip, Inc. | Method and apparatus for extending equipment uptime in ion implantation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH035701Y2 (OSRAM) | 1991-02-14 |