JPS61134884U - - Google Patents

Info

Publication number
JPS61134884U
JPS61134884U JP1693785U JP1693785U JPS61134884U JP S61134884 U JPS61134884 U JP S61134884U JP 1693785 U JP1693785 U JP 1693785U JP 1693785 U JP1693785 U JP 1693785U JP S61134884 U JPS61134884 U JP S61134884U
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JP
Japan
Prior art keywords
link mechanism
moving member
article
view
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1693785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1693785U priority Critical patent/JPS61134884U/ja
Publication of JPS61134884U publication Critical patent/JPS61134884U/ja
Pending legal-status Critical Current

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  • Specific Conveyance Elements (AREA)
JP1693785U 1985-02-08 1985-02-08 Pending JPS61134884U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1693785U JPS61134884U (enrdf_load_stackoverflow) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1693785U JPS61134884U (enrdf_load_stackoverflow) 1985-02-08 1985-02-08

Publications (1)

Publication Number Publication Date
JPS61134884U true JPS61134884U (enrdf_load_stackoverflow) 1986-08-22

Family

ID=30504175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1693785U Pending JPS61134884U (enrdf_load_stackoverflow) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPS61134884U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100316606B1 (ko) * 1999-12-31 2001-12-12 황인길 반도체 웨이퍼 핸들러

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100316606B1 (ko) * 1999-12-31 2001-12-12 황인길 반도체 웨이퍼 핸들러

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